共 50 条
- [3] Plasma nitridation for atomic layer etching of Ni JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2024, 42 (02):
- [4] Plasma atomic layer etching using conventional plasma equipment JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2009, 27 (01): : 37 - 50
- [5] Advanced Plasma Etching Processing: Atomic Layer Etching for Nanoscale Devices PLASMA NANO SCIENCE AND TECHNOLOGY, 2017, 77 (03): : 25 - 28
- [8] Plasma enhanced atomic layer deposition and atomic layer etching of gallium oxide using trimethylgallium JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2022, 40 (04):
- [9] Plasma atomic layer etching for titanium nitride at low temperatures JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2022, 40 (02):