共 50 条
- [33] Numerical analysis of the transportation characteristics of a self-running sliding stage based on near-field acoustic levitation 1600, Acoustical Society of America (138):
- [34] Numerical analysis of the transportation characteristics of a self-running sliding stage based on near-field acoustic levitation JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 2015, 138 (06): : 3723 - 3732
- [37] Experimental sensitivity analysis for near-field acoustic holography PROCEEDINGS OF ISMA 2002: INTERNATIONAL CONFERENCE ON NOISE AND VIBRATION ENGINEERING, VOLS 1-5, 2002, : 1799 - 1807
- [38] Near-field acoustic levitation of 8'' Si wafer and glass substrate using flexural vibration INSTITUTE OF ENVIRONMENTAL SCIENCES 1996 PROCEEDINGS - CONTAMINATION CONTROL: SYMPOSIUM ON MINIENVIRONMENTS/42ND ANNUAL TECHNICAL MEETING - EXPANDING OUR TECHNICAL EXCELLENCE THROUGH EDUCATION, 1996, : 500 - 505