Theoretical Investigation of DBD Discharge Development for VUV Emission in Excimer Lamp

被引：2
|
作者：
Benmoussa, Amar [1 ,2 ]
Bouchachia, Abdelali [1 ]
Ghaleb, Fatiha [1 ]
Belasri, Ahmed [1 ]
Harrache, Zoheir [1 ]
Bendella, Soumia [1 ]
机构：
[1] Univ Oran Sci & Technol, Lab Phys Plasmas Mat Cond & Leurs Applicat LPPMCA, USTO MB, Oran, Algeria
[2] Ecole Super Genie Elect &Energet ESG2E, Oran, Algeria
来源：
PLASMA CHEMISTRY AND PLASMA PROCESSING | 2023年 / 43卷 / 03期
关键词：
Cold plasma; VUV emission; Dielectric barrier discharge; Rare gas; DIELECTRIC BARRIER DISCHARGE; PLASMA; EFFICIENCY; EXCILAMPS; POWER; UV; MICRODISCHARGES; RADIATION; MIXTURE; PHYSICS;
D O I：
10.1007/s11090-023-10316-z
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
The present work is devoted to the study of DBD discharge development in Ne-Xe gas mixture for optimization of UV source efficiency in excimer lamps. This study was based on a longitudinal on-dimensional model of the dielectric barrier discharge DBD with the aim to investigate the discharge conditions for excimer lamps working and VUV emissions optimization. The results of the present description show the concentration of charged particles, photonic species, and excited atoms and molecules. The effect of operation conditions such as applied voltage, gas mixture composition, and gas pressure, as well as the secondary electron emission due to ion impact at the cathode on DBD discharge characteristics and 173 nm photon generation have been also analyzed and discussed.
引用
收藏
页码：657 / 677
页数：21
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