Special issues and sections;
Meetings;
Semiconductor device manufacture;
D O I:
10.1109/TSM.2023.3323254
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
Since its beginning in 1992 in Japan, International Symposium on Semiconductor Manufacturing (ISSM) has provided unique opportunities to share the best practices of semiconductor manufacturing technologies for professionals. At the symposiums, semiconductor manufacturing professionals discussed the technologies developed to meet the worldwide requirements for advanced manufacturing. It is becoming crucial to re-examine semiconductor manufacturing in terms of fundamental principles to improve the performance of semiconductor devices. Moreover, utilizing artificial intelligence and machine learning technologies to improve semiconductor manufacturing have become a new challenge. These manufacturing technology challenges are showing the need for drastic revolutionary concept and stronger collaborative efforts to find solutions to the precompetitive challenges.
机构:
School of Engineering and Technology, Sunway University, Subang Jaya,47500, MalaysiaSchool of Engineering and Technology, Sunway University, Subang Jaya,47500, Malaysia
Demidenko, Serge
Depari, Alessandro
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机构:
Department of Information Engineering, University of Brescia, Brescia,25123, ItalySchool of Engineering and Technology, Sunway University, Subang Jaya,47500, Malaysia
机构:
Univ Catania, Dipartimento Ingn Elettr Elettron & Informat, Catania, Italy
Univ Catania, Instrumentat & Measurement, Catania, ItalyUniv Catania, Dipartimento Ingn Elettr Elettron & Informat, Catania, Italy