Review-Electroforming Process for Microsystems Fabrication

被引:2
|
作者
Rai, Prince Kumar [1 ]
Gupta, Ankur [1 ]
机构
[1] Indian Inst Technol Jodhpur, Dept Mech Engn, Jodhpur 342030, Rajasthan, India
关键词
ULTRASONIC AGITATION; FE-NI; THICKNESS UNIFORMITY; ADHESION STRENGTH; MASS-TRANSFER; PULSE; LIGA; ELECTRODEPOSITION; NICKEL; LAYER;
D O I
10.1149/1945-7111/ad0d16
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Being an unconventional technique of additive micro-manufacturing, electroforming has garnered significant interest from various industrial sectors because of its capability to offer advanced micro-manufacturing competences with high precision in achieving dimensional uniformity and replication accuracy at a small scale. This paper reports a comprehensive review of the electroforming process as a microsystem fabrication technique. This process is superior to 3D printing, stereolithography, selective laser sintering, physical and chemical vapor deposition, etc. in many aspects due to its unique properties. It can deposit a variety of metals and alloys, including precious metals, making it appropriate for various applications in the microfabrication domain. This article covers the fundamental aspects of electroforming, its history, the current state-of-the-art advancements, the modeling associated with it, and its importance in an industrial context. Additionally, the article discusses the advantages and limitations of this technique and their respective microsystem applications. Finally, it concludes with a discussion on the future prospects and potential advancements in the field of electroforming, contributing to the development of microsystems. Review covering advancements in electroforming tailored to microfabrication devices.Coverage of industrial applications of electroforming.Highlights of the importance of data-driven decision-making and process optimization.Significance and challenges of electroforming modelling.Industry 4.0 implementation and its benefits to electroforming industries.
引用
下载
收藏
页数:25
相关论文
共 50 条
  • [1] ELECTROFORMING AS A FABRICATION PROCESS
    WATSON, SA
    METALL, 1971, 25 (06): : 683 - &
  • [2] Fabrication of Ni metal mask by electroforming process using wetting
    Lim, Jun Hyung
    Park, Eui Cheol
    Lee, Seung Yi
    Yoon, Jeong-Won
    Ha, Sang-Su
    Joo, Jinho
    Lee, Hoo-Jeong
    Jung, Seung-Boo
    Song, Keun
    JOURNAL OF ELECTRONIC MATERIALS, 2007, 36 (11) : 1510 - 1515
  • [3] Fabrication of Ni Metal Mask by Electroforming Process Using Wetting Agents
    Jun Hyung Lim
    Eui Cheol Park
    Seung Yi Lee
    Jeong-Won Yoon
    Sang-Su Ha
    Jinho Joo
    Hoo-Jeong Lee
    Seung-Boo Jung
    Keun Song
    Journal of Electronic Materials, 2007, 36 : 1510 - 1515
  • [4] Fast-fabrication process for low environmental impact microsystems
    Lemaire, Etienne
    Thuau, Damien
    Caillard, Benjamin
    Dufour, Isabelle
    JOURNAL OF CLEANER PRODUCTION, 2015, 108 : 207 - 216
  • [5] A study on fabrication of nickel fine pitch probe needle with electroforming process
    Chul-Woo Park
    Young-Soo Park
    Kyoung-Yong Park
    International Journal of Precision Engineering and Manufacturing, 2014, 15 : 2149 - 2154
  • [6] Fabrication of the bulk amorphous Ni-W alloy by an electroforming process
    Wakayama, S.
    Kimoto, Y.
    Takigawa, Y.
    Uesugi, T.
    Higashi, K.
    PRICM 6: SIXTH PACIFIC RIM INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS AND PROCESSING, PTS 1-3, 2007, 561-565 : 1375 - 1378
  • [7] A Study on Fabrication of Nickel Fine Pitch Probe Needle with Electroforming Process
    Park, Chul-Woo
    Park, Young-Soo
    Park, Kyoung-Yong
    INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2014, 15 (10) : 2149 - 2154
  • [8] NiColoy: A versatile electroforming process for bio-sensor fabrication by embossing
    Stein, B
    Kunnavakkarn, M
    Stelick, S
    Batt, C
    PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2, 2003, : 679 - 683
  • [9] Fabrication of silicon microsystems
    Wood, David
    Engineering Science and Education Journal, 2000, 9 (03) : 129 - 136
  • [10] An introduction to microsystems fabrication
    Michelutti, L
    Terrot, JM
    Seassal, C
    MICROELECTRONICS EDUCATION, 2000, : 297 - 300