Effect of Pulsed Laser Irradiation on Microstructure and Evolution of Residual Stress for Gold Film

被引：3

作者：

Zhou, Shujun ^{[1
]}

Wu, Wei ^{[2
]}

Huang, Xiao ^{[1
]}

Shao, Tianmin ^{[2
]}

Shao, Meng ^{[3
]}

机构：

[1] China Univ Min & Technol Beijing, Sch Mech Elect & Informat Engn, Beijing 100083, Peoples R China

[2] Tsinghua Univ, State Key Lab Tribol, Beijing 100084, Peoples R China

[3] Shengyi Technol Beijing Co LTD, Res & Dev Dept R&D, Beijing 100176, Peoples R China

来源：

ADVANCED ENGINEERING MATERIALS | 2023年 / 25卷 / 06期

基金：

中国国家自然科学基金;

关键词：

gold films; microstructures; pulsed laser irradiations; residual stress; stability; THIN-FILMS; CU FILMS; AU; IMPROVEMENT; TEXTURE; SURFACE; STRAIN; CREEP;

D O I：

10.1002/adem.202201249

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Gold film is extensively used in a variety of electronic, optical, and magnetic instruments or devices. Effect of pulsed laser irradiation on microstructure and evolution of residual stress for gold film is studied. Gold film deposited on a silica substrate is irradiated by pulsed laser with different energy densities. Microstructures of the gold film before and after laser irradiation are studied by using scanning electron microscope, scanning transmission electron microscope, and energy-dispersive X-ray spectrometry. Recrystallization occurs during laser irradiation. Most of the original defects in the as-deposited gold film are eliminated, and the films become smooth and more compact after laser irradiation. Curvature-based technique using Stoney formula is applied to evaluate the residual stress. Pulsed laser irradiation results in the increase in tensile residual stress and stability of the residual stress.

引用

页数：10

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