Review on piezoelectric actuators: materials, classifications, applications, and recent trends

被引:4
|
作者
Zhou, Xuyang [1 ]
Wu, Shuang [2 ]
Wang, Xiaoxu [2 ]
Wang, Zhenshan [1 ]
Zhu, Qixuan [1 ]
Sun, Jinshuai [1 ]
Huang, Panfeng [2 ]
Wang, Xuewen [1 ]
Huang, Wei [1 ]
Lu, Qianbo [1 ,3 ]
机构
[1] Northwestern Polytech Univ, Inst Flexible Elect IFE, Xian 710072, Peoples R China
[2] Northwestern Polytech Univ, Sch Automat, Xian 710072, Peoples R China
[3] Ningbo Inst Northwestern Polytech Univ, Key Lab Flexible Elect Zhejiang Prov, Ningbo 315103, Peoples R China
基金
中国国家自然科学基金;
关键词
piezoelectric actuator; piezoelectric effect; amplified piezoelectric actuator; ultrasonic actuator; stepping actuator; piezoelectric polymer; WAVE ULTRASONIC MOTOR; ROTARY ACTUATOR; WORKING STROKE; DESIGN; MECHANISM; PERFORMANCE; UNIMORPH; SYSTEM; CERAMICS; BEHAVIOR;
D O I
10.1007/s11465-023-0772-0
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Piezoelectric actuators are a class of actuators that precisely transfer input electric energy into displacement, force, or movement outputs efficiently via inverse piezoelectric effect-based electromechanical coupling. Various types of piezoelectric actuators have sprung up and gained widespread use in various applications in terms of compelling attributes, such as high precision, flexibility of stoke, immunity to electromagnetic interference, and structural scalability. This paper systematically reviews the piezoelectric materials, operating principles, representative schemes, characteristics, and potential applications of each mainstream type of piezoelectric actuator. Herein, we intend to provide a more scientific and nuanced perspective to classify piezoelectric actuators into direct and indirect categories with several subcategories. In addition, this review outlines the pros and cons and the future development trends for all kinds of piezoelectric actuators by exploring the relations and mechanisms behind them. The rich content and detailed comparison can help build an in-depth and holistic understanding of piezoelectric actuators and pave the way for future research and the selection of practical applications.
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页数:29
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