Controlling strain in suspended Nanomaterials

被引：0
|
作者：
Hermann, Sascha [1 ,2 ]
Boettger, Simon [1 ,2 ]
Albrecht, Jan [3 ]
机构：
[1] Chemnitz Univ, Ctr Microtechnol, Chemnitz, Germany
[2] Chemnitz Univ, Ctr Mat Architecture & Integrat Nanomembrananes, Chemnitz, Germany
[3] Fraunhofer Inst Elect Nano Syst ENAS, Chemnitz, Germany
来源：
2023 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, IITC AND IEEE MATERIALS FOR ADVANCED METALLIZATION CONFERENCE, MAM, IITC/MAM | 2023年
关键词：
strained nanomaterial; NEMS; strain engineering; straintronics; strain sensor; CNT; graphene; 1D and 2D nanomaterial; CARBON NANOTUBES; MECHANICAL RESONATORS; GRAPHENE;
D O I：
10.1109/IITC/MAM57687.2023.10154704
中图分类号：
TP39 [计算机的应用];
学科分类号：
081203 ; 0835 ;
摘要：
The use of nanomaterials in emerging electronics and sensor technologies is becoming more prevalent due to their unique properties. However, controlling the strain states of these materials in nanodevices remains a persistent challenge. Incorporating mechanical strain in a controllable manner is crucial and is simplified here for suspended nanomaterial assemblies in nano-electro-mechanical system (NEMS) configurations. We discuss a verified CMOS compatible and scalable surface micromachining approach with respect to design capabilities based on FE simulations. It is shown that inplane stress applicable in multi-axial directions can be controlled by only a few geometry factors and by process parameters of strain mediating stress layers.
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页数：4
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