High-precision micro-displacement sensing based on an optical filter and optoelectronic oscillators

被引:3
|
作者
Luo, Hao [1 ]
Yu, Jinlong [1 ]
Wang, Ju [1 ]
Ma, Chuang [1 ]
Han, Xu [1 ]
Su, Xuemin [1 ]
机构
[1] Tianjin Univ, Sch Elect & Informat Engn, Tianjin 300072, Peoples R China
基金
中国国家自然科学基金;
关键词
HETERODYNE GRATING INTERFEROMETER;
D O I
10.1364/OE.493068
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
High-precision micro-displacement sensing based on an optical filter and optoelectronic oscillators (OEOs) is proposed and experimentally demonstrated. In this scheme, an optical filter is utilized to separate the carriers of the measurement and reference OEO loops. Through the optical filter, the common path structure can be consequently achieved. The two OEO loops share all optical/electrical components, except for the micro-displacement to be measured. Measurement and reference OEOs are alternately oscillated by using a magneto-optic switch. Therefore, self-calibration is achieved without additional cavity length control circuits, greatly simplifying the system. A theoretical analysis of the system is developed, and this analysis is then demonstrated with experiments. Regarding the micro-displacement measurements, we achieved a sensitivity of 312.058 kHz/mm and a measurement resolution of 356 pm. The measurement precision is less than 130 nm over a measurement range of 19 mm.
引用
收藏
页码:19278 / 19292
页数:15
相关论文
共 50 条
  • [21] Micro-displacement and rotation measurement method of precision worktable based on radon transformation
    Jiang, Gedong
    Tao, Tao
    Mei, Xuesong
    Yuan, Yuanhao
    [J]. Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University, 2009, 43 (05): : 31 - 35
  • [22] Micro-displacement sensing circuit for gyroscope with levitated rotor
    Ren Mingyuan
    Liu Xiaowei
    Zuo Wen
    Mao Zhigang
    [J]. MICRO-NANO TECHNOLOGY XIV, PTS 1-4, 2013, 562-565 : 292 - 295
  • [23] High-precision and Long-range distance measurement independent of temperature based on two optoelectronic oscillators
    Fan, ZhiQiang
    Su, Jun
    Zhang, TianHang
    Yang, Ning
    Qiu, Qi
    [J]. 2017 INTERNATIONAL TOPICAL MEETING ON MICROWAVE PHOTONICS (MWP), 2017,
  • [24] High-Resolution Micro-Displacement Measurement using a Fiber MZI Based on Microwave Photonics Filter
    Lei, Jing
    Song, Zixuan
    Cheng, Yunjie
    Wang, Yiping
    [J]. 2019 CROSS STRAIT QUAD-REGIONAL RADIO SCIENCE AND WIRELESS TECHNOLOGY CONFERENCE (CSQRWC), 2019,
  • [25] A Novel Micro-Displacement Measuring Method Based on Optical Path Modulation
    Qu Wei
    Ye Hong-An
    [J]. CHINESE PHYSICS LETTERS, 2010, 27 (07)
  • [26] Long-range, high-precision optical calibration path based on an optoelectronic oscillator
    Wang, Ju
    Su, Xuemin
    Yu, Jinlong
    Luo, Hao
    Ma, Chuang
    Liu, Lingchao
    [J]. OPTICS EXPRESS, 2024, 32 (09): : 15788 - 15800
  • [27] High-precision laser beam lateral displacement measurement based on differential wavefront sensing
    Xia, Qi
    Liang, Yu-Rong
    Yan, Hao
    Xu, Zhi-Lin
    Liu, Li
    Zhou, Ze-Bing
    [J]. OPTICS LETTERS, 2023, 48 (20) : 5281 - 5284
  • [28] Study on PZT micro-displacement driving technology in precision machining
    Xu, Liming
    Hu, Dejin
    Deng, Qilin
    Zhao, Xiaoming
    [J]. Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering, 2002, 38 (SUPPL.): : 43 - 47
  • [29] Micro-displacement sensing technique using a Fabry-Perot interferometer with a relay optical fiber
    Mori, Yuya
    Fukahori, Takeru
    Nagase, Ryo
    [J]. 2022 IEEE CPMT SYMPOSIUM JAPAN (ICSJ), 2022,
  • [30] Micro-displacement measurement based on Electronic Speckle
    Lang Xiaoping
    Li Xiaoying
    [J]. FOURTH INTERNATIONAL SEMINAR ON MODERN CUTTING AND MEASUREMENT ENGINEERING, 2011, 7997