Optical and acoustic phonons in turbostratic and cubic boron nitride thin films on diamond substrates

被引:6
|
作者
Guzman, Erick [1 ]
Kargar, Fariborz [1 ]
Patel, Avani [2 ,3 ]
Vishwakarma, Saurabh [3 ]
Wright, Dylan [1 ,4 ]
Wilson, Richard B. [5 ]
Smith, David J. [2 ]
Nemanich, Robert J. [2 ]
Balandin, Alexander A. [1 ,4 ]
机构
[1] Univ Calif Riverside, Dept Elect & Comp Engn, Riverside, CA 92521 USA
[2] Arizona State Univ, Dept Phys, Tempe, AZ 85287 USA
[3] Arizona State Univ, Sch Engn Matter Transport & Energy, Tempe, AZ 85287 USA
[4] Univ Calif Los Angeles, Dept Mat Sci & Engn, Los Angeles, CA 90095 USA
[5] Univ Calif Riverside, Dept Mech Engn, Riverside, CA 92521 USA
基金
美国国家科学基金会;
关键词
Ultrawide-bandgap materials; Diamond; Cubic boron nitride; Brillouin light scattering; Raman spectroscopy; DOPED DIAMOND; BRILLOUIN-SCATTERING; LIGHT-SCATTERING; BN;
D O I
10.1016/j.diamond.2023.110452
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We report an investigation of the bulk optical, bulk acoustic, and surface acoustic phonons in thin films of turbostratic boron nitride (t-BN) and cubic boron nitride (c-BN) grown on B-doped polycrystalline and singlecrystalline diamond (001) and (111) substrates. The characteristics of different types of phonons were studied using Raman and Brillouin-Mandelstam light scattering spectroscopies. The atomic structure of the films was determined using high-resolution transmission electron microscopy (HRTEM) and correlated with the Raman and Brillouin-Mandelstam spectroscopy data. The HRTEM analysis revealed that the cubic boron nitride thin films consisted of a mixture of c-BN and t-BN phases, with c-BN being the dominant phase. It was found that while visible Raman spectroscopy provided information for characterizing the t-BN phase, it faced challenges in differentiating the c-BN phase either due to the presence of high-density defects or the overlapping of the Raman features with those from the B-doped diamond substrates. In contrast, Brillouin-Mandelstam spectroscopy clearly distinguishes the bulk longitudinal and surface acoustic phonons of the c-BN thin films grown on diamond substrates. Additionally, the angle-dependent surface Brillouin-Mandelstam scattering data show the peaks associated with the Rayleigh surface acoustic waves, which have higher phase velocities in c-BN films on diamond (111) substrates. These findings provide valuable insights into the phonon characteristics of the c-BN and diamond interfaces and have important implications for the thermal management of electronic devices based on ultra-wide-band-gap materials.
引用
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页数:9
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