Impact of SAW Slowness Shape on Anti-Resonance Quality Factor of RF SAW Resonators

被引：9
|
作者：
He, Yiwen [1 ]
Yang, Zijiang [2 ]
Yang, Ying [1 ]
Wu, Ting [1 ]
Wei, Zijie [3 ]
Shuai, Yao [3 ]
Wu, Chuangui [3 ]
Bao, Jingfu [1 ]
Hashimoto, Ken-Ya [1 ]
机构：
[1] Univ Elect Sci & Technol China, Sch Integrated Circuit Sci & Engn, Chengdu 611731, Peoples R China
[2] Univ Elect & Sci Technol China, Sch Elect Sci & Engn, Chengdu 611731, Peoples R China
[3] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Device, Chengdu 610045, Peoples R China
来源：
IEEE ELECTRON DEVICE LETTERS | 2023年 / 44卷 / 10期
基金：
中国国家自然科学基金;
关键词：
Anti-resonance quality factor; aperture; slowness; surface acoustic wave (SAW);
D O I：
10.1109/LED.2023.3301875
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This letter investigates impact of the surface acoustic wave (SAW) slowness curvature on anti-resonance quality factor ( Q(a) ) of RF SAW resonators. First, variation of SAW resonance characteristics with aperture width W is studied using periodic three dimensional finite-element method for three structures with different slowness curvature. It is shown that the slowness shape affects the frequency (f) dependence of Bode Q , and smaller slowness curvature makes the Bode Q less sensitive to both f and W . This means that when the curvature is small, SAWs propagate like parallel beams on the substrate surface and are scarcely influenced by discontinuities at side boundaries such as electrode tips. Since loss mechanisms in the aperture region mainly contribute to the Bode Q reduction, high Q(a) and maximum Bode Q are achievable. Finally, series of I.H.P. SAW resonators using 42 degrees YX-LiTaO3 are fabricated, and it is verified that the Bode Q is not sensitive to W when the electrode ohmic loss is ignored.
引用
收藏
页码：1728 / 1731
页数：4
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