OPTIMIZATION OF DIAMOND-LIKE CARBON COATINGS FOR MECHANICAL AND TRIBOLOGICAL APPLICATIONS. REVIEW

被引:0
|
作者
Reshetnyak, E. N. [1 ]
Luchaninov, A. A. [1 ]
Strel'nitskij, V. E. [1 ]
机构
[1] Natl Sci Ctr, Kharkov Inst Phys & Technol, Kharkiv, Ukraine
关键词
CATHODIC-ARC; DLC COATINGS; HARD CARBON; ION-IMPLANTATION; ELASTIC-MODULUS; SUBSTRATE BIAS; RF PLASMA; FILMS; STRESS; DEPOSITION;
D O I
10.46813/2023-144-074
中图分类号
O57 [原子核物理学、高能物理学];
学科分类号
070202 ;
摘要
Diamond-like carbon (DLC) coatings are used to improve the quality of industrial products due to a wide range of exceptional physical, mechanical and tribological properties. Problems that limit the scope of application of hard non-hydrogenated DLC coatings with properties closest to those of diamond are considered. The scientific literature is reviewed devoted to improving the characteristics of DLC-based wear-resistant coatings. The approaches currently used to reduce internal compressive stresses, improve adhesion to the substrate, and increase the strength of coatings are analyzed. Aspects of optimization of deposition parameters, doping, constructing the gradient and multilayer structure are considered. Based on the generalization of the results of the reviewed publications, a conclusion is made about the advantages of using coatings with a multilayer structure. A promising design undoped multilayer DLC coatings with high protective properties is discussed.
引用
收藏
页码:74 / 93
页数:20
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