[1] Zhengzhou Univ, Sch Mech & Safety Engn, Zhengzhou 450001, Peoples R China
[2] Zhengzhou Univ, Engn Technol Res Ctr Henan Prov MEMS Mfg & Applica, Zhengzhou 450001, Peoples R China
[3] Inst Appl Phys & Computat Math, Lab Computat Phys, POB 8009-26, Beijing 100088, Peoples R China
[4] Peking Univ, Ctr Appl Phys & Technol, HEDPS, Beijing 100871, Peoples R China
[5] Peking Univ, Coll Engn, Beijing 100871, Peoples R China
[6] Beijing Inst Technol, State Key Lab Explos Sci & Technol, Beijing 100081, Peoples R China
[7] Shan Dong Jiaotong Univ, Sch Aeronaut, Jinan 250357, Peoples R China
[8] Zhengzhou Univ, Ind Technol Res Inst, Zhengzhou 450001, Peoples R China