Two-dimensional precise figuring of 500 mm-long X-ray mirror using one-dimensional ion beam system

被引：3
|
作者：
Huang, Qiu-Shi [1 ,2 ,3 ]
Huang, Han-Dan [1 ,2 ,3 ]
Wu, Qiao-Yu [1 ,2 ,3 ]
Yu, Jun [1 ,2 ,3 ]
Zhang, Zhong [1 ,2 ,3 ]
Wang, Zhan-Shan [1 ,2 ,3 ]
机构：
[1] Tongji Univ, Inst Precis Opt Engn IPOE, Sch Phys Sci & Engn, MOE Key Lab Adv Microstruct Mat, Shanghai 200092, Peoples R China
[2] Tongji Univ, Shanghai Prof Tech Serv Platform Full Spectrum & H, Shanghai 200092, Peoples R China
[3] Tongji Univ, Shanghai Frontiers Sci Ctr Digital Opt, Shanghai 200092, Peoples R China
来源：
ADVANCES IN MANUFACTURING | 2024年 / 12卷 / 01期
基金：
中国国家自然科学基金;
关键词：
Long-size mirrors; Ion beam figuring; Two-dimensional figure correction; Mask;
D O I：
10.1007/s40436-023-00459-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this study, a new method was developed to realize two-dimensional (2D) figure correction of grazingincidence X-ray mirrors using a one-dimensional (1D) ionbeam figuring system. A mask of holes was specifically designed to generate removal functions at different widths and extend the figuring capability over a wide area. Accordingly, a long mirror could be manufactured. Using this method, the surface height root-mean-square (RMS) error of the center area of 484 mm x 16 mm was reduced from 11.49 nm to 2.01 nm, and the 1D meridional RMS error reached 1.0 nm. The proposed method exhibits high precision and cost effectiveness for production of long X-ray mirrors.
引用
收藏
页码：177 / 184
页数：8
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