High Q-value Solid Mounted Resonator Based on Aluminum Nitride Film

被引：1
|
作者：
Qu, Yuanhang [1 ]
Chen, Xiang [1 ]
Gu, Xiyu [2 ]
Wen, Zhiwei [1 ]
Cai, Yao [1 ]
Liu, Yan [1 ]
Sun, Chengliang [1 ]
机构：
[1] Wuhan Univ, Inst Technol Sci, Wuhan, Peoples R China
[2] Wuhan Univ, Sch Phys & Technol, Wuhan, Peoples R China
来源：
2023 7TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE, EDTM | 2023年
基金：
中国博士后科学基金;
关键词：
high quality factor; solid mounted resonator and aluminum nitride;
D O I：
10.1109/EDTM55494.2023.10103079
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The transverse acoustic energy leakage in solid mounted resonators (SMRs) generally affects the Q-factor of the resonator. In this work, a design based on lateral high and low acoustic impedance structure is proposed to confine the energy of SMR. The measured results show that the Q-factor of the designed high-Q SMR is 59% higher than that of the traditional SMR.
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页数：3
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