High Q-value Solid Mounted Resonator Based on Aluminum Nitride Film

被引：1

作者：

Qu, Yuanhang ^{[1
]}

Chen, Xiang ^{[1
]}

Gu, Xiyu ^{[2
]}

Wen, Zhiwei ^{[1
]}

Cai, Yao ^{[1
]}

Liu, Yan ^{[1
]}

Sun, Chengliang ^{[1
]}

机构：

[1] Wuhan Univ, Inst Technol Sci, Wuhan, Peoples R China

[2] Wuhan Univ, Sch Phys & Technol, Wuhan, Peoples R China

来源：

2023 7TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE, EDTM | 2023年

基金：

中国博士后科学基金;

关键词：

high quality factor; solid mounted resonator and aluminum nitride;

D O I：

10.1109/EDTM55494.2023.10103079

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The transverse acoustic energy leakage in solid mounted resonators (SMRs) generally affects the Q-factor of the resonator. In this work, a design based on lateral high and low acoustic impedance structure is proposed to confine the energy of SMR. The measured results show that the Q-factor of the designed high-Q SMR is 59% higher than that of the traditional SMR.

引用

页数：3

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