共 50 条
- [42] Electrostatically actuated membrane mirrors for adaptive optics MOEMS AND MINATURIZED SYSTEMS III, 2003, 4983 : 250 - 258
- [43] Analysis of an Electrostatically Actuated MEMS Drop Ejector NANOTECH CONFERENCE & EXPO 2009, VOL 3, TECHNICAL PROCEEDINGS: NANOTECHNOLOGY 2009: BIOFUELS, RENEWABLE ENERGY, COATINGS FLUIDICS AND COMPACT MODELING, 2009, : 521 - +
- [45] Mixed frequency excitation of an electrostatically actuated resonator Microsystem Technologies, 2016, 22 : 1967 - 1974
- [48] Particle Trapping in Electrostatically Actuated Nanofluidic Barriers 2015 IEEE 58TH INTERNATIONAL MIDWEST SYMPOSIUM ON CIRCUITS AND SYSTEMS (MWSCAS), 2015,
- [49] Contact Time Study of Electrostatically Actuated Microsystems SCIENTIA IRANICA TRANSACTION B-MECHANICAL ENGINEERING, 2010, 17 (05): : 348 - 357
- [50] On the differential flatness and control of electrostatically actuated MEMS ACC: PROCEEDINGS OF THE 2005 AMERICAN CONTROL CONFERENCE, VOLS 1-7, 2005, : 2493 - 2498