Influences of Cu Doping on the Microstructure, Optical and Resistance Switching Properties of Zinc OxideThin Films

被引：4

作者：

Weng, Jun-Hong ^{[1
]}

Kao, Ming-Cheng ^{[2
]}

Chen, Kai-Huang ^{[3
]}

Li, Men-Zhe ^{[4
]}

机构：

[1] Tunghai Univ, Dept Elect Engn, Taichung 40704, Taiwan

[2] Chaoyang Univ Technol, Dept Informat & Commun Engn, Taichung 413310, Taiwan

[3] Cheng Shiu Univ, Ctr Environm Toxin & Emerging Contaminant Res, Super Micro Mass Res & Technol Ctr, Dept Elect Engn, Chengcing Rd, Kaohsiung 83347, Taiwan

[4] Hsiuping Univ Sci & Technol, Dept Elect Engn, Taichung 41280, Taiwan

来源：

NANOMATERIALS | 2023年 / 13卷 / 19期

关键词：

ZnO; sol-gel; thin films; resistive switching; MEMORY; MODEL;

D O I：

10.3390/nano13192685

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Copper-doped zinc oxide films (Zn1-xCuxO) (x = 0, 2%, 4%, 6%) were fabricated on conductive substrates using the sol-gel process. The crystal structure, optical and resistive switching properties of Zn1-xCuxO films are studied and discussed. RRAM is made using Zn1-xCuxO as the resistive layer. The results show that the (002) peak intensity and grain size of Zn1-xCuxOfilms increase from 0 to 6%. In addition, PL spectroscopy shows that the oxygen vacancy defect density of Zn1-xCuxO films also increases with the increase in Cu. The improved resistive switching performance of the RRAM device can be attributed to the formation of conductive filaments and the destruction of more oxygen vacancies in the Zn1-xCuxO film. Consequently, the RRAM device exhibits a higher low resistance state to high resistance state ratio and an HRS state of higher resistance value.

引用

页数：10

共 50 条

[21] Influence of Gadolinium Doping on The Crystalline Structure and Optical Properties of Zinc Oxide Thin Films
Sarip, N.
Mahmud, F.
Sahdan, M. Z.
Tawil, S. N. M.
2014 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS (ICSE), 2014, : 274 - 277
[22] Effect of Lithium doping in the Optical and Structural properties of Zinc Oxide films by SILAR method
Sreedevi, Gopika Anandanpillai
Sreekumar, Sreehari
Vamadevan, Rakhesh
INTERNATIONAL CONFERENCE ON ENERGY AND ENVIRONMENT 2019 (ICEE 2K19), 2020, 2287
[23] Effect of the oxygen partial pressure on the microstructure and optical properties of ZnO:Cu films
Tao, Y. M.
Ma, S. Y.
Chen, H. X.
Meng, J. X.
Hou, L. L.
Jia, Y. F.
Shang, X. R.
VACUUM, 2011, 85 (07) : 744 - 748
[24] The Role of Au Doping on the Structural and Optical Properties of Cu2O Films
Guneri, Emine
JOURNAL OF NANO RESEARCH, 2019, 58 : 49 - 67
[25] Effect of Cu-doping on structural, optical and photoluminescence properties of CdS thin films
Muthusamy, M.
Muthukumaran, S.
OPTIK, 2015, 126 (24): : 5200 - 5206
[26] The effect of Cu doping on the mechanical and optical properties of zinc oxide nanowires synthesized by hydrothermal route
Robak, Elzbieta
Coy, Emerson
Kotkowiak, Michal
Jurga, Stefan
Zaleski, Karol
Drozdowski, Henryk
NANOTECHNOLOGY, 2016, 27 (17)
[27] Preparation of aluminum doped zinc oxide films and the study of their microstructure, electrical and optical properties
Zhou, Hong-ming
Yi, Dan-qing
Yu, Zhi-ming
Mao, Lai-rong
Li, Jian
THIN SOLID FILMS, 2007, 515 (17) : 6909 - 6914
[28] Microstructure, and electrical properties of zinc films on InP
Kaminska, E
Piotrowska, A
Barcz, A
Kasjaniuk, S
Mizera, E
Dynowska, E
POLYCRYSTALLINE THIN FILMS: STRUCTURE, TEXTURE, PROPERTIES, AND APPLICATIONS II, 1996, 403 : 465 - 470
[29] Nanostructured Cu-doped ZnS polycrystalline thin films produced by a wet chemical route: the influences of Cu doping and film thickness on the structural, optical and electrical properties
A. Goktas
F. Aslan
A. Tumbul
Journal of Sol-Gel Science and Technology, 2015, 75 : 45 - 53
[30] Nanostructured Cu-doped ZnS polycrystalline thin films produced by a wet chemical route: the influences of Cu doping and film thickness on the structural, optical and electrical properties
Goktas, A.
Aslan, F.
Tumbul, A.
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2015, 75 (01) : 45 - 53

← 1 2 3 4 5 →