Studying the effects of siloxane poisoning on a SnO2 metal oxide semiconductor gas sensor in temperature cycled operation enabling self-monitoring and self-compensation

被引:0
|
作者
Schultealbert, Caroline [1 ]
Baur, Tobias [1 ]
Sauerwald, Tilman [1 ]
Schuetze, Andreas [1 ,2 ]
机构
[1] Saarland Univ, Lab Measurement Technol, Campus A5-1, D-66123 Saarbrucken, Germany
[2] Fraunhofer Inst Verfahrenstech & Verpackung IVV, Giggenhauser Str 35, D-85354 Freising Weihenstephan, Germany
关键词
metal oxide semiconductor gas sensor; siloxane poisoning; sensor self-test; Metalloxid Halbleitergassensor; Siloxanvergiftung; Sensor Selbsttest; VOLATILE METHYL SILOXANES; AIR; HYDROGEN; SURFACE;
D O I
10.1515/teme-2023-0065
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
This work studies poisoning by the cyclic siloxane octamethylcyclotetrasiloxane on a commercially available semiconductor gas sensor in TCO (temperature cycled operation). The data is evaluated using the Sauerwald-Baur model and the DSR method (differential surface reduction). The sensitivity towards several gases (volatile organic compounds, hydrogen and carbon monoxide) is evaluated and compared with a sensor in constant temperature operation mode. The physical and chemical processes on the sensitive layer as well as the resulting selectivity towards hydrogen are discussed. A feature is identified that can be derived from the Sauerwald-Baur model (the differential surface oxidation, DSO) and that quantitatively expresses the sensor condition regarding siloxane poisoning. With the help of this feature, a self-compensation of the sensor signal is demonstrated.
引用
收藏
页码:691 / 702
页数:12
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