Low-cost self-cleaning room temperature SnO2 thin film gas sensor on polymer nanostructures

被引:2
|
作者
Huo, Haibin
Yan, Fadong
Wang, Cong
Ren, Haizhou
Shen, Mengyan [1 ]
机构
[1] Univ Massachusetts Lowell, Dept Phys & Appl Phys, 1 Univ Ave, Lowell, MA 01854 USA
基金
美国国家科学基金会;
关键词
thin film sensor; tin oxide; CO gas; nanospike; soft nanolithography; self-cleaning; FEMTOSECOND LASER IRRADIATION; REGULAR ARRAYS; SILICON;
D O I
10.1117/12.847260
中图分类号
V [航空、航天];
学科分类号
08 ; 0825 ;
摘要
We have successfully fabricated SnO2 thin film CO gas sensors on nanospiked polyurethane (PU) polymer surfaces that are replicated with a low-cost soft nanolithography method from nanospiked silicon surfaces formed with femtosecond laser irradiations. The sensors show sensitive responses to the CO gas at room temperature because of the sharp structures of the nanospikes. This is much different from the sensors of SnO2 thin film coated on smooth surfaces that show no response to the CO gas at room temperature. To make the nanostructure sensor surface behave self-cleaning like lotus leaves, we deposited a silane monolayer on the surface of the sensors with the 1H,1H,2H,2H-perfluorooctyltrichlorosilane (PFOTS) which has low surface energy. The contact angle measurement conducted on the PFOTS monolayer-coated SnO2 gas sensors indicates that a super-hydrophobic surface formed on the nanospike sensor. The CO gas response sensitivity of the PFOTS-coated SnO2 sensors is almost the same to that of the as-fabricated SnO2 sensors without the PFOTS coating. Such a super-hydrophobic surface can protect the sensors exposed to moisture and heavy particulates, and can perform cleaning-in-place operations to prolong the lifetime of the sensors. These results show a great potential to fabricate thousands of identical gas sensors at low cost.
引用
收藏
页数:8
相关论文
共 50 条
  • [1] Room Temperature SnO2 Thin Film Gas Sensor Fabricated on Si Nanospikes
    Huo, H. B.
    Wang, C.
    Yan, F. D.
    Ren, H. Z.
    Shen, M. Y.
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2009, 9 (08) : 4817 - 4819
  • [2] Modification of coral-like SnO2 nanostructures with dense TiO2 nanoparticles for a self-cleaning gas sensor
    Wan, Yuteng
    Liu, Jinyun
    Fu, Xiangqian
    Zhang, Xiaoman
    Meng, Fanli
    Yu, Xinyao
    Jin, Zhen
    Kong, Lingtao
    Liu, Jinhuai
    TALANTA, 2012, 99 : 394 - 403
  • [3] Enhanced room temperature ozone response of SnO2 thin film sensor
    Belaqziz, Mohamed
    Amjoud, M'barek
    Gaddari, Abdelhadi
    Rhouta, Benaissa
    Mezzane, Daoud
    SUPERLATTICES AND MICROSTRUCTURES, 2014, 71 : 185 - 189
  • [4] Photosensitivity activation of SnO2 thin film gas sensors at room temperature
    Camagni, P
    Faglia, G
    Galinetto, P
    Perego, C
    Samoggia, G
    Sberveglieri, G
    SENSORS AND ACTUATORS B-CHEMICAL, 1996, 31 (1-2) : 99 - 103
  • [5] Highly sensitive SnO2 thin film NO2 gas sensor operating at low temperature
    Kaur, Jaswinder
    Roy, Somnath C.
    Bhatnagar, M. C.
    SENSORS AND ACTUATORS B-CHEMICAL, 2007, 123 (02): : 1090 - 1095
  • [6] A novel gas sensor based on SnO2/Os thin film for the detection of methane at low temperature
    Quaranta, F
    Rella, R
    Siciliano, P
    Capone, S
    Epifani, M
    Vasanelli, L
    Licciulli, A
    Zocco, A
    SENSORS AND ACTUATORS B-CHEMICAL, 1999, 58 (1-3) : 350 - 355
  • [7] Fast response thin film SnO2 gas sensors operating at room temperature
    Wang, H. C.
    Li, Y.
    Yang, M. J.
    SENSORS AND ACTUATORS B-CHEMICAL, 2006, 119 (02) : 380 - 383
  • [8] SnO2 Nanowire Gas Sensor Operating at Room Temperature
    Park, Jae-Hwan
    Cho, Mun-Seong
    Lim, Donggun
    Park, Jae-Gwan
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2014, 14 (10) : 8038 - 8042
  • [9] SnO2 films for thin film gas sensor design
    Korotchenkov, G
    Brynzari, V
    Dmitriev, S
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1999, 63 (03): : 195 - 204
  • [10] SiC Foams Decorated with SnO2 Nanostructures for Room Temperature Gas Sensing
    Karakuscu, Aylin
    Ponzoni, Andrea
    Comini, Elisabetta
    Sberveglieri, Giorgio
    Vakifahmetoglu, Cekdar
    INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY, 2014, 11 (05) : 851 - 857