[1] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Key Lab Opt Syst Adv Mfg Technol, 3888 Dongnanhu Rd, Changchun 130033, Peoples R China
[2] Univ Chinese Acad Sci, Coll Da Heng, Beijing 100039, Peoples R China
[3] Chinese Acad Sci, State Key Lab Appl Opt, Changchun Inst Opt Fine Mech & Phys, Changchun 130033, Peoples R China
[4] Jlight Semicond Technol Co Ltd, Changchun 130033, Peoples R China