Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS

被引：6
|
作者：
Liang, Xiaorui [1 ,2 ]
Zhang, Lei [1 ,2 ]
Tan, Qiulin [1 ,2 ]
Cheng, Wenhua [1 ,2 ]
Hu, Dan [1 ,2 ]
Li, Shuang [1 ,2 ]
Jing, Lin [3 ]
Xiong, Jijun [1 ,2 ]
机构：
[1] North Univ China, State Key Lab Dynam Measurement Technol, Taiyuan 030051, Peoples R China
[2] North Univ China, Key Lab Micro Nano Devices & Syst, Minist Educ, Taiyuan 030051, Peoples R China
[3] Nanyang Technol Univ, Sch Mat Sci & Engn, 50 Nanyang Ave, Singapore 639798, Singapore
来源：
MICROSYSTEMS & NANOENGINEERING | 2023年 / 9卷 / 01期
基金：
中国国家自然科学基金; 国家重点研发计划;
关键词：
D O I：
10.1038/s41378-023-00586-0
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
This paper presents a surface acoustic wave (SAW) sensor based on coplanar integrated Langasite (LGS) that is fabricated using wet etching, high-temperature bonding, and ion beam etching (IBE) processes. The miniaturized multiparameter temperature-pressure-humidity (TPH) sensor used the MXene@MoS2@Go (MMG) composite to widen the humidity detection range and improve the humidity sensitivity, including a fast response time (3.18 s) and recovery time (0.94 s). The TPH sensor was shown to operate steadily between 25-700 & DEG;C, 0-700 kPa, and 10-98% RH. Coupling issues among multiple parameters in complex environments were addressed by decoupling the & UDelta;f-temperature coupling factor to improve the accuracy. Therefore, this work can be applied to simultaneous measurements of several environmental parameters in challenging conditions.
引用
收藏
页数：13
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