Investigation of the Physical and Mechanical Properties of Coatings Obtained by the Vacuum-Arc Sputtering of Ti-B-Si-Ni Cathodes Manufactured Using Self-Propagating High-Temperature Synthesis and Pressing

被引:5
|
作者
Savostikov, V. M. [1 ]
Leonov, A. A. [1 ]
Denisov, V. V. [1 ]
Denisova, Yu. A. [1 ]
Skosyrsky, A. B. [1 ,2 ]
Shulepov, I. A. [3 ]
机构
[1] Russian Acad Sci, Inst High Current Elect, Siberian Branch, Tomsk 634055, Russia
[2] Natl Res Tomsk State Univ, Tomsk 634050, Russia
[3] Russian Acad Sci, Inst Strength Phys & Mat Sci, Siberian Branch, Tomsk 634055, Russia
来源
JOURNAL OF SURFACE INVESTIGATION | 2023年 / 17卷 / 03期
关键词
vacuum-arc installation; cathodes; surface coatings; hardness; Auger spectroscopy; X-ray diffraction analysis; nitrides; borides; scratch testing; adhesion; THERMAL-STABILITY; DEPOSITION; SURFACE;
D O I
10.1134/S102745102303031X
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
The article presents the results of a study of vacuum-arc coatings obtained by the sputtering of Ti-B-Si-Ni cathodes fabricated using self-propagating high-temperature synthesis with simultaneous pressing. The techniques for manufacturing cathodes of the indicated composition are characterized; the modernized HNV 6.6-I1 installation, the conditions and modes of coating deposition in an argon atmosphere and in a nitrogen + argon gas mixture in the ratio of 90/10 are described. To study the physical and mechanical properties of the resulting coatings, the hardness is measured at different loads on the indenter; the strength of adhesion to the base is assessed by the Rockwell method; the elemental composition of the cathodes and the (Ti-B-Si-Ni)N coating is determined using Auger spectroscopy, and the phase composition of the (Ti-B-Si-Ni)N coating is determined using X-ray phase analysis; a study of the properties of the coating (Ti-B-Si-Ni) is carried out by scratch testing. As a result of a comprehensive analysis of the results obtained, it is concluded that the high hardness of the (Ti-B-Si-Ni)N coating (more than 40 GPa) is due to its composition, which includes both nitrides and high-hardness titanium borides. The heterophase nature of the structure of this coating can serve as a contribution to the stressed state of the material. The coating has a graded-layer structure. The material contains a Ti-B-Si-Ni layer bound to the substrate and the main functional layer (Ti-B-Si-Ni)N. The coating has both a high hardness and sufficient strength of adhesion to the base (adhesion) determined by scratch testing. The combination of these properties makes the material promising for its practical application in the production of tools.
引用
收藏
页码:681 / 686
页数:6
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