Mid-infrared integrated silicon-germanium ring resonator with high Q-factor

We report the realization of a silicon-germanium on silicon ring resonator with high Q-factor at mid-infrared wavelengths. The fabricated ring exhibits a loaded Q-factor of 236 000 at the operating wavelength of 4.18 mu m. Considering the combined waveguide propagation losses and bending losses, which are measured to be below 0.2 dB/cm, even higher Q-factors could be achieved on this platform. Furthermore, our dispersion engineering of the waveguides should make these microrings suitable for nonlinear optical applications. These results pave the way for sensing applications and nonlinear optics in the mid-infrared range.