Roll-to-Roll Patterning of Indium-Tin-Oxide Electrodes Using a Low-Cost Laser-Marking Machine

被引:0
|
作者
Chakraborty, Sajal [1 ]
Ahn, Sung Il [1 ]
机构
[1] Pusan Natl Univ, Inst Plast Informat & Energy Mat, Dept Chem Educ, Grad Dept Chem Mat, Busandaehakro 63-2, Busan 46241, South Korea
基金
新加坡国家研究基金会;
关键词
direct laser patterning; flexible indium-tin-oxide (ITO); flexible sensors; laser-marking machine; roll-to-roll; THIN-FILMS;
D O I
10.1002/adem.202300656
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This study aims to explore the optimal process conditions for patterning indium-tin-oxide electrodes with polyethylene terephthalate films using a low-cost laser-marking machine equipped with an F-theta lens. The feasibility of applying this equipment in roll-to-roll (R2R) processes and flexible sensors is also investigated. Moreover, the study involves analyzing the laser characteristics, precision, and focal length of the equipment, as well as adjusting the laser power and focal length to achieve the desired line width without damaging the substrate. The proposed equipment and an R2R patterning method are applied to a pressure-leak sensor that employs a surfactant as the sensing material. The findings show that the low-cost laser-marking machine can be used for flexible sensor research and can support a fast, cost-effective patterning method, making it possible to develop new sensors quickly.
引用
收藏
页数:9
相关论文
共 50 条
  • [41] Low-cost deposition of highly-conducting indium-tin-oxide transparent films by chemical process; spray CVD and dip coating
    Sawada, Y
    ADVANCED MATERIALS PROCESSING II, 2003, 437-4 : 23 - 26
  • [42] Selecting non-halogenated low-toxic hole transporting materials for Roll-to-Roll perovskite solar cells using carbon electrodes
    Parvazian, Ershad
    Beynon, David
    Jenkins, Olivia
    Patidar, Rahul
    Mcgettrick, James
    Ngombe, Samual
    Patil, Bhushan
    Garcia-Rodriguez, Rodrigo
    Villalobos, Karen Valadez
    Davies, Peter
    Davies, Mathew
    Watson, Trystan
    COMMUNICATIONS MATERIALS, 2024, 5 (01)
  • [43] Direct-write patterning of indium-tin-oxide film by high pulse repetition frequency femtosecond laser ablation
    Choi, H. W.
    Farson, D. F.
    Bovatsek, J.
    Arai, A.
    Ashkenasi, D.
    APPLIED OPTICS, 2007, 46 (23) : 5792 - 5799
  • [44] Excimer laser projection photoablation and lift-off process for patterning of indium-tin-oxide for cost-effective fabrication of flat-panel displays
    Chae, Junghun
    Appasami, Sreeram
    Jain, Kanti
    EMERGING LIQUID CRYSTAL TECHNOLOGIES III, 2008, 6911
  • [45] Low-temperature growth of low-resistivity indium-tin-oxide thin films by pulsed laser deposition
    Adurodija, FO
    Izumi, H
    Ishihara, T
    Yoshioka, H
    Matsui, H
    Motoyama, M
    VACUUM, 2000, 59 (2-3) : 641 - 648
  • [46] A low-temperature and short-annealing process for metal oxide thin film transistors using deep ultraviolet light for roll-to-roll processing
    Chae, Daehwan
    Kim, Jaemin
    Shin, Jaehak
    Lee, Wi Hyoung
    Ko, Sunglim
    CURRENT APPLIED PHYSICS, 2019, 19 (08) : 954 - 960
  • [47] Selective patterning of indium tin oxide films using 1064 nm laser for microparts processing
    Chung, Chen-Kuei
    Tu, Kun-Tse
    MICRO & NANO LETTERS, 2014, 9 (10) : 669 - 672
  • [48] Roll angle estimation using low cost MEMS sensors for paddy field machine
    Hu, Lian
    Yang, Weiwei
    He, Jing
    Zhou, Hao
    Zhang, Zhigang
    Luo, Xiwen
    Zhao, Runmao
    Tang, Lingmao
    Du, Pan
    COMPUTERS AND ELECTRONICS IN AGRICULTURE, 2019, 158 : 183 - 188
  • [49] Performance enhancement of III-V multi-junction solar cells using indium-tin-oxide electrodes
    Kao, Yu-Cheng
    Ou, Sin-Liang
    Wu, Fan-Lei
    Horng, Ray-Hua
    THIN SOLID FILMS, 2016, 612 : 36 - 40
  • [50] Nondestructive electroluminescence characterization of as-grown semiconductor optoelectronic device structures using indium-tin-oxide coated electrodes
    Ghosh, S
    Hosea, TJC
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2000, 71 (04): : 1911 - 1912