Dielectric resonator in rectangular ??102 cavity for electron paramagnetic resonance study of thin films

被引：0

作者：

Lemishko, S. V. ^{[1
]}

Vorona, I. P. ^{[1
]}

Yukhymchuk, V. O. ^{[1
]}

Bratus, V. Ya. ^{[1
]}

Okulov, S. M. ^{[1
]}

Nosenko, V. V. ^{[1
,2
]}

Solopan, S. O. ^{[3
]}

Belous, A. G. ^{[3
]}

机构：

[1] Natl Acad Sci Ukraine, VE Lashkaryov Inst Semicond Phys, 41, Nauky Ave, UA-03028 Kiev, Ukraine

[2] Linkoping Univ, Dept Phys Chem & Biol, S-58183 Linkoping, Sweden

[3] Natl Acad Sci Ukraine, VI Vernadsky Inst Gen & Inorgan Chem, 32-34, Academician Palladin Ave, UA-03142 Kiev, Ukraine

来源：

THIN SOLID FILMS | 2023年 / 768卷

关键词：

Dielectric resonator; Electron paramagnetic resonance; Thin films; Barium tetratitanate; Signal sensitivity; Signal increase;

D O I：

10.1016/j.tsf.2023.139703

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The improved compared to a rectangular TE(102 )cavity geometry of a dielectric resonator (DR) suitable for studying thin films and coatings has been calculated and experimentally verified. It is shown that electron paramagnetic resonance (EPR) signal of SiOx films can be enhanced by using as the DR of two rectangular parallelepipeds fabricated from BaTi4O9 + 8.5% ZnO ceramics (epsilon=36) with dimension of 5.64x5.5 x 5.9 mm(3 )and a gap of up to 0.5 mm between them. Located inside a standard rectangular metal TE(102 )cavity of the X-band EPR spectrometer, the DR increases the filling factor by 5-12 times depending on the size of a sample studied. The experimental use of the DR allows to increase the EPR signal of the 950 nm SiOx thin film by a factor of approximately 4.

引用

页数：5

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