CMOS MEMS Resonator for Physical Reservoir Computing

被引：1

作者：

Chiu, Yi ^{[1
,2
]}

Tsai, Fang-Wei ^{[1
]}

Wang, Liang-Kai ^{[1
]}

Lee, Yuan-Chieh ^{[1
]}

Garg, Manu ^{[2
,3
]}

Hong, Hao-Chiao ^{[1
]}

机构：

[1] Natl Yang Ming Chiao Tung Univ, Dept Elect & Comp Engn, Hsinchu, Taiwan

[2] Natl Yang Ming Chiao Tung Univ, Int Coll Semicond Technol, Hsinchu, Taiwan

[3] Indian Inst Technol Delhi IITD, Ctr Appl Res Elect CARE, New Delhi, India

来源：

2023 IEEE SENSORS | 2023年

关键词：

CMOS MEMS; physical reservoir computing; clamped-clamped beam; FPGA; parity benchmark;

D O I：

10.1109/SENSORS56945.2023.10325281

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

This paper presents a CMOS-MEMS clamped-clamped (CC) beam for physical reservoir computing. The device is designed and fabricated in the CMOS back-end-of-line (BEOL) metal and oxide layers. The resonant beam is electrostatically actuated to operate in the nonlinear states for delay-based physical reservoir computing. The closed-loop reservoir computing is realized by the nonlinear CC beam, a field programmable gate array (FPGA) controller, and a lock-in amplifier. The fabricated and post-processed CMOS MEMS device were characterized. Preliminary parity benchmark tests in different test conditions are presented.

引用

页数：4

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