CMOS MEMS Resonator for Physical Reservoir Computing

被引：1
|
作者：
Chiu, Yi [1 ,2 ]
Tsai, Fang-Wei [1 ]
Wang, Liang-Kai [1 ]
Lee, Yuan-Chieh [1 ]
Garg, Manu [2 ,3 ]
Hong, Hao-Chiao [1 ]
机构：
[1] Natl Yang Ming Chiao Tung Univ, Dept Elect & Comp Engn, Hsinchu, Taiwan
[2] Natl Yang Ming Chiao Tung Univ, Int Coll Semicond Technol, Hsinchu, Taiwan
[3] Indian Inst Technol Delhi IITD, Ctr Appl Res Elect CARE, New Delhi, India
来源：
2023 IEEE SENSORS | 2023年
关键词：
CMOS MEMS; physical reservoir computing; clamped-clamped beam; FPGA; parity benchmark;
D O I：
10.1109/SENSORS56945.2023.10325281
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
This paper presents a CMOS-MEMS clamped-clamped (CC) beam for physical reservoir computing. The device is designed and fabricated in the CMOS back-end-of-line (BEOL) metal and oxide layers. The resonant beam is electrostatically actuated to operate in the nonlinear states for delay-based physical reservoir computing. The closed-loop reservoir computing is realized by the nonlinear CC beam, a field programmable gate array (FPGA) controller, and a lock-in amplifier. The fabricated and post-processed CMOS MEMS device were characterized. Preliminary parity benchmark tests in different test conditions are presented.
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页数：4
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