Experiments on scan shifts correction for coherence scanning interferometry

In this paper, a solution is proposed for solving the lateral shift of the scanned images stack in coherence scanning interferometry (CSI). Pre-image processing is performed on a captured stack of scanned images of square structures without the fringes. It is useful to identify the lateral shift response, which is then utilized to correct a subsequent series of scanned images with fringes having the same optical scanning parameters. Thus, eliminating the scan-line shift in the reconstructed images. The experiments results show that the error due to the scan-line shift can be improved qualitatively and quantitatively by around 0.6 -0.7% at the lateral axis.