A 220 GHz superconducting titanium transition edge sensor array developed for cosmic microwave background experiments

被引：3
|
作者：
Luo, Qianghui [1 ,2 ]
Zhong, Jiaqiang [1 ]
Miao, Wei [1 ]
Li, Feiming [1 ,2 ]
Wang, Qingcheng [1 ,2 ]
Ding, Jiangqiao [1 ,3 ]
Wu, Feng [1 ]
Wang, Zheng [1 ]
Zhou, Kangmin [1 ]
Ren, Yuan [1 ]
Zhang, Wen [1 ]
Li, Jing [1 ]
Shi, Shengcai [1 ]
机构：
[1] Chinese Acad Sci, Purple Mt Observ, Nanjing 210033, Peoples R China
[2] Univ Sci & Technol China, Hefei 230026, Peoples R China
[3] Nanjing Univ Informat Sci Technol, Nanjing 210044, Peoples R China
来源：
SUPERCONDUCTOR SCIENCE & TECHNOLOGY | 2023年 / 36卷 / 11期
基金：
中国国家自然科学基金;
关键词：
cosmic microwave background; superconducting transition edge sensor array; thermal conductance; complex impedance; noise equivalent power; PRIMORDIAL GRAVITATIONAL-WAVES; GRAVITY-WAVES; SILICON; POLARIZATION; BOLOMETER; GAS;
D O I：
10.1088/1361-6668/acf73b
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In this paper, we report on the design, fabrication, and characterization of a 220 GHz superconducting transition edge sensor (TES) array developed for ground-based cosmic microwave background (CMB) experiments. Unlike conventional TES arrays adopting thermometers made of bilayer superconducting films, the TES array has thermometers made of simpler single-layer titanium (Ti) film deposited on a suspended silicon nitride (SiN x ) membrane. The thermal weak link is realized by releasing the TES's thermal island including the Ti thermometer by dry etching with xenon difluoride (XeF2), giving a typical thermal conductance of 25 pW K-1. Its thermal-conductance mechanism is further studied by fitting the measured TES's complex impedance with a three-block thermal model. The dark and optical noise equivalent power (NEP) of a superconducting TES are both measured. Despite existing lens reflection and dielectric loss in the superconducting microstrip line, its typical optical NEP reaches 100 aW Hz-0.5, which meets the sensitivity requirement for ground-based CMB experiments.
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页数：9
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