共 50 条
- [1] Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2023, 41 (05):
- [2] Plasma-enhanced atomic layer deposition of tungsten nitride JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2016, 34 (05):
- [3] Plasma-enhanced atomic layer deposition of vanadium nitride JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2019, 37 (06):
- [7] Plasma-enhanced atomic layer deposition of titanium vanadium nitride JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2018, 36 (06):
- [8] Plasma-enhanced atomic layer deposition of superconducting niobium nitride JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2017, 35 (01):