Study on the Impact of Positioning Errors on the Process Performance of Robotic Bonnet Polishing

High-precision optical components are widely used in major fields such as strong lasers and astronomy, but the production cycle of components is greatly constrained by the difficulty of machining optical components and the high price of special polishing machines, so it is important to develop a high-efficiency and low-cost fast polishing system for optical components. By combining bonnet polishing technology with industrial robotics, we have developed an industrial robotics bonnet polishing system for optical components, and the effect of robot positioning errors on pad trimming and on the polishing of the entire surface is also analyzed. To verify the processing capability of the robotic bonnet polishing device, polishing pad dressing experiments and optical component surface correction polishing experiments were carried out. After the pad was dressed, the runout value was reduced from 182 to 23 & mu;m with a convergence ratio of 7.9. After polishing the optical component twice, the PV and RMS values on the surface of the component decreased significantly, from 38.05 & lambda; and 9.98 & lambda; to 8.65 & lambda; and 1.38 & lambda; (& lambda; = 632.8) respectively in the middle area of the component, with a convergence ratio of 4.4 and 7.2, proving that the robotic bonnet polishing system can be applied to the polishing process of optical components.