Feedback signal detection and drive signal compensation for electromagnetic MEMS scanning mirror based on FPGA

The inherent characteristics of Micro Electro Mechanical Systems (MEMS) mirrors are subject to change due to operational conditions and usage duration. Currently, most methods for driving, detecting, and compensating electromagnetic MEMS mirrors require complex modules. This paper introduces an approach based almost entirely on Field Programmable Gate Array (FPGA). The proposed method involves the construction of a Direct Digital Synthesizer (DDS) with adjustable frequency, amplitude and phase, a high -precision digital cross-correlation detector, and a proportion integration differentiation (PID) compensator based on FPGA. The system does not necessitate stringent external module requirements and is capable of achieving precise detection and stable operation of the rotation angle of MEMS mirrors.