Microwave dielectric characterization and densification mechanism analysis of CaO-B2O3-SiO2 glass-ceramic/Al2O3 composites for LTCC applications

被引:4
|
作者
Xiong, Zilong [1 ]
Xue, Wenzhuo [1 ]
Li, Mujun [1 ]
Tan, Feihu [1 ,2 ,4 ]
Chen, Yupeng [1 ,2 ,4 ]
Yu, Hongyu [1 ,2 ,3 ,4 ]
机构
[1] South Univ Sci & Technol, Sch Microelect, Shenzhen, Peoples R China
[2] Southern Univ Sci & Technol, Engn Res Ctr Integrated Circuits Next Generat Comm, Minist Educ, Shenzhen, Peoples R China
[3] Southern Univ Sci & Technol, GaN Device Engn Technol Res Ctr Guangdong, Shenzhen, Peoples R China
[4] South Univ Sci & Technol, Sch Microelect, Shenzhen 518055, Peoples R China
关键词
Densification mechanism; Dielectric properties; LTCC; LOW-TEMPERATURE; SINTERING TEMPERATURE; FLEXURAL STRENGTH; GLASS COMPOSITE; CRYSTALLIZATION; VISCOSITY; CERAMICS; BEHAVIOR; SYSTEMS; PHASE;
D O I
10.1111/jace.19436
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this study, nine component points were designed based on a CaO-B2O3-SiO2 (CBS) glass system with a high boron content, and CBS glass/Al2O3 composites were developed for low-temperature co-fired ceramic (LTCC) applications. Furthermore, the densification process, phase compositions, microstructures, and properties were investigated. The results indicated that the softening of glass and interfacial reaction between the glass and Al2O3 were the two most important factors affecting LTCC's densification process. The real-time shrinkage rate of LTCC during sintering was simulated using the thermal shrinkage curve and combined withDTAand X-ray diffraction. Itwas proven that the formation of the CaAl2(BO3)O phase contributed to the reduction in glass viscosity and promoted the formation of a dense structure. The LTCC composite with 30 vol% glass sintered at 850 degrees C exhibited a coefficient of thermal expansion of 4.55-6.35 ppm/oC, epsilon(r) of 3.5-5.0, and a minimum tan delta of 0.0018 at 15GHz. Therefore, these properties make the CBS-LTCC more suitable for high-frequency applications.
引用
收藏
页码:234 / 243
页数:10
相关论文
共 50 条
  • [41] Microstructure and Strength of Al2O3/Al2O3 Joints Bonded with ZnO-Al2O3-B2O3-SiO2 Glass-Ceramic
    Zhu, Weiwei
    Chen, Jichun
    Hao, Chuanyong
    Zhang, Jinsong
    [J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2014, 30 (09) : 944 - 948
  • [42] Effect of spray process on dielectric properties of APS-deposited CaO-B2O3-SiO2 glass-ceramic coatings
    Li, Qi
    Hu, Jing
    Xie, Jianliang
    Wang, Xin
    Yu, Chengyong
    Jiang, Shaoliang
    Liu, Zhijie
    Jiang, Xianyu
    Sun, Chenli
    Li, En
    Deng, Longjiang
    [J]. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2020, 40 (13) : 4527 - 4535
  • [43] The Influence of CaF2 Doping on the Sintering Behavior and Microwave Dielectric Properties of CaO-B2O3-SiO2 Glass-Ceramics for LTCC Applications
    Dong, Chao
    Wang, Hua
    Yan, Tingnan
    Zhao, Jianwei
    Xu, Jiwen
    Wang, Dawei
    [J]. CRYSTALS, 2023, 13 (05)
  • [44] Preparation of a CaO–Al2O3–B2O3–SiO2 glass/Al2O3 LTCC substrate material with high flexural strength for microwave application
    Xuelian Zhu
    Haijun Mao
    Fenglin Wang
    Riran Liang
    Xingyu Chen
    Zhuofeng Liu
    Wei Li
    Weijun Zhang
    [J]. Journal of Materials Science: Materials in Electronics, 2023, 34
  • [45] Low temperature sintering and characteristics of K2O–B2O3–SiO2–Al2O3 glass/ceramic composites for LTCC applications
    Qin Xia
    Chao-Wei Zhong
    Jian Luo
    [J]. Journal of Materials Science: Materials in Electronics, 2014, 25 : 4187 - 4192
  • [46] Preparation of a CaO-Al2O3-B2O3-SiO2 glass/Al2O3 LTCC substrate material with high flexural strength for microwave application
    Zhu, Xuelian
    Mao, Haijun
    Wang, Fenglin
    Liang, Riran
    Chen, Xingyu
    Liu, Zhuofeng
    Li, Wei
    Zhang, Weijun
    [J]. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2023, 34 (13)
  • [47] Low temperature sintering and properties of CaO-B2O3-SiO2 system glass ceramics for LTCC applications
    Zhu, Haikui
    Zhou, Hongqing
    Liu, Min
    Wei, Pengfei
    Ning, Ge
    [J]. JOURNAL OF ALLOYS AND COMPOUNDS, 2009, 482 (1-2) : 272 - 275
  • [48] Sintering behavior and dielectric properties of La2O3–B2O3–CaO–P2O5 glass/Al2O3 composites for LTCC applications
    Zhaoren Chen
    Xingyu Chen
    Weijun Zhang
    Haijun Mao
    Fenglin Wang
    [J]. Journal of Materials Science: Materials in Electronics, 2020, 31 : 18581 - 18589
  • [49] Densification and microwave properties of low-temperature co-fired CaO-B2O3-SiO2 glass-ceramic with La-B-Si additions
    Zhou, Xiaohua
    Li, Enzhu
    Yang, Shilin
    Li, Bo
    Tang, Bin
    Yuan, Ying
    Zhang, Shuren
    [J]. INTERNATIONAL JOURNAL OF MATERIALS RESEARCH, 2013, 104 (06) : 606 - 608
  • [50] Tailoring sintering kinetics and dielectric properties of Li2SiO3 ceramics by CaO-B2O3-SiO2 glass dopant for LTCC substrate applications
    Sun, Chengli
    Zhou, Xing
    Liang, Fuxia
    Yang, Hongyu
    Xia, Dawei
    Tang, Bin
    Zhang, Shuren
    Xing, Mengjiang
    [J]. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2022, 33 (07) : 4043 - 4050