Microwave dielectric characterization and densification mechanism analysis of CaO-B2O3-SiO2 glass-ceramic/Al2O3 composites for LTCC applications

被引:4
|
作者
Xiong, Zilong [1 ]
Xue, Wenzhuo [1 ]
Li, Mujun [1 ]
Tan, Feihu [1 ,2 ,4 ]
Chen, Yupeng [1 ,2 ,4 ]
Yu, Hongyu [1 ,2 ,3 ,4 ]
机构
[1] South Univ Sci & Technol, Sch Microelect, Shenzhen, Peoples R China
[2] Southern Univ Sci & Technol, Engn Res Ctr Integrated Circuits Next Generat Comm, Minist Educ, Shenzhen, Peoples R China
[3] Southern Univ Sci & Technol, GaN Device Engn Technol Res Ctr Guangdong, Shenzhen, Peoples R China
[4] South Univ Sci & Technol, Sch Microelect, Shenzhen 518055, Peoples R China
关键词
Densification mechanism; Dielectric properties; LTCC; LOW-TEMPERATURE; SINTERING TEMPERATURE; FLEXURAL STRENGTH; GLASS COMPOSITE; CRYSTALLIZATION; VISCOSITY; CERAMICS; BEHAVIOR; SYSTEMS; PHASE;
D O I
10.1111/jace.19436
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this study, nine component points were designed based on a CaO-B2O3-SiO2 (CBS) glass system with a high boron content, and CBS glass/Al2O3 composites were developed for low-temperature co-fired ceramic (LTCC) applications. Furthermore, the densification process, phase compositions, microstructures, and properties were investigated. The results indicated that the softening of glass and interfacial reaction between the glass and Al2O3 were the two most important factors affecting LTCC's densification process. The real-time shrinkage rate of LTCC during sintering was simulated using the thermal shrinkage curve and combined withDTAand X-ray diffraction. Itwas proven that the formation of the CaAl2(BO3)O phase contributed to the reduction in glass viscosity and promoted the formation of a dense structure. The LTCC composite with 30 vol% glass sintered at 850 degrees C exhibited a coefficient of thermal expansion of 4.55-6.35 ppm/oC, epsilon(r) of 3.5-5.0, and a minimum tan delta of 0.0018 at 15GHz. Therefore, these properties make the CBS-LTCC more suitable for high-frequency applications.
引用
收藏
页码:234 / 243
页数:10
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