Extraction Technique for the Conduction Band Minimum Energy in Amorphous Indium-Gallium-Zinc-Oxide Thin Film Transistors

被引:3
|
作者
Kim, Haesung [1 ]
Yoo, Han Bin [1 ]
Lee, Heesung [2 ]
Ryu, Ji Hee [1 ]
Park, Ju Young [1 ]
Han, Seung Hyeop [1 ]
Yang, Hyojin [1 ]
Bae, Jong-Ho [1 ]
Choi, Sung-Jin [1 ]
Kim, Dae Hwan [1 ]
Kim, Dong Myong [1 ]
机构
[1] Kookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
[2] SEC, Memory Business, DRAM PA Team, DRAM Prod & Technol, Pyeongtaek 17786, Gyeonggi, South Korea
基金
新加坡国家研究基金会;
关键词
Thin film transistors; Logic gates; Optimized production technology; Threshold voltage; Substrates; Random access memory; Indium; Amorphous oxide semiconductor-based thin film transistors (AOS TFTS); amorphous indium-gallium-zinc-oxide (a-IGZO)-TFTS; conduction band minimum energy; extraction technique; mobility edge; SUBGAP DOS; CAPACITANCE; STATES;
D O I
10.1109/TED.2023.3269735
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The conduction band minimum energy in amorphous oxide semiconductor-based thin film transistors (AOS TFTs) is a key parameter governing the accurate extraction of energy distribution for the subgap density-of states (DOSs) and carrier mobility. We report a technique for extraction of the gate voltage (V-CBM) and corresponding energy (E-F,E-CBM = EC-EREF) for the quasi-Fermi level (E-F) equal to the conduction band minimum (E-C) as V-CBM = V-GS (E-F = E-C) and E-F,E-CBM = E-F (V-GS = V-CBM). In order to confirm this technique through optoelectronic experimental data, amorphous indium-gallium-zinc-oxide (a-IGZO)based thin film transistor was irradiated with various wavelengths and power, and obtained V-CBM = 7.1 V and E-F CBM = 71 meV in the dark state. This technique is expected to be useful in the accurate characterization of the subgap DOS and the effective mobility in AOS TFTs through a simple and effective extraction process.
引用
收藏
页码:3126 / 3130
页数:5
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