Photochemically Activated Mn3O4 Thin Films That Are Produced Using SILAR for Highly Stable Flexible Gas Sensors

被引：8

作者：

Huang, Wen-Chun ^{[1
]}

Lee, Yi-Chen ^{[2
]}

Chen, Yu-Zhe ^{[2
]}

Wu, Chieh-Ming ^{[2
]}

Hsueh, Wen-Jeng ^{[1
]}

Liao, Su-Yu ^{[2
]}

Huang, Chun-Ying ^{[2
]}

机构：

[1] Natl Taiwan Univ, Dept Engn Sci & Ocean Engn, Taipei 10660, Taiwan

[2] Natl Chi Nan Univ, Dept Appl Mat & Optoelect Engn, Nantou 545, Taiwan

来源：

IEEE SENSORS JOURNAL | 2023年 / 23卷 / 18期

关键词：

Flexible gas sensors; Mn3O4; photochemical activation; successive ionic layer adsorption and reaction (SILAR) method; SENSING PROPERTIES; OZONE DETECTION; NANOSTRUCTURES;

D O I：

10.1109/JSEN.2023.3303412

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on a highly stable p-type Mn3O4 flexible gas sensor for room-temperature detection of O-3. The Mn3O4 film is deposited by the successive ionic layer adsorption and reaction (SILAR) method at low temperatures and photochemically activated by an ultraviolet (UV) light-emitting diode (LED) at room temperature. The Mn3O4 gas sensor exhibits gas response, response time, and recovery time of 1.65, 159, and 130 s, respectively, against 5-ppm O-3 gas at a UV intensity of 20 mW/cm(2). It enables high selectivity for O-3 gas against various toxic gases even at room temperature. Moreover, the flexible gas sensor exhibits negligible degradation over 60 days and folds reproducibly after repeated bending for 300 cycles. These results strongly support that an Mn3O4 film deposited by SILAR is a good candidate for room-temperature flexible gas sensors for the applications of wearable devices.

引用

页码：21001 / 21009

页数：9

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