On the Mechanisms of Symmetry Breaking in Plasma-Chemical High-Frequency Low-Pressure Capacitive Reactors

被引：0

作者：

Dvinin, S. A. ^{[1
]}

Kodirzoda, Z. A. ^{[2
]}

Sinkevich, O. A. ^{[3
]}

Solikhov, D. K. ^{[2
]}

机构：

[1] Lomonosov Moscow State Univ, Moscow 119991, Russia

[2] Tajik Natl Univ, Fac Phys, Dushanbe 734035, Tajikistan

[3] Natl Res Univ, MPEI, Moscow 111250, Russia

来源：

HIGH ENERGY CHEMISTRY | 2023年 / 57卷 / SUPPL 1期

关键词：

ELECTROMAGNETIC-FIELD EXCITATION; FEATURES;

D O I：

10.1134/S0018143923070093

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

High-frequency low pressure capacitive discharges are widely used for the implementation of plasma-chemical technologies. An increase in the size and frequency of the supporting HF field in modern devices has led to the need to take into account electromagnetic effects in the implementation of various discharge forms. In the microwave range of fields, in this case, the appearance of field instabilities is possible, accompanied by a violation of the plasma homogeneity. In this work, it is shown that two mechanisms of symmetry breaking are also possible in the low pressure capacitive discharges: those associated with the ionization-field instability and with a change in the sheath's thickness.

引用

页码：S28 / S31

页数：4

共 50 条

[41] EFFECT OF HYDROGEN ON LOW-PRESSURE METHANE DECOMPOSITION IN HIGH-FREQUENCY DISCHARGE
SZYMANSKI, A
PODGORSK.A
ZEITSCHRIFT FUR PHYSIKALISCHE CHEMIE-LEIPZIG, 1973, 254 (5-6): : 305 - 317
[42] PHOTOMETRIC CHARACTERISTICS OF INDUCED HIGH-FREQUENCY DISCHARGE IN LOW-PRESSURE GASES
LASSALE, J
SICART, J
COMPTES RENDUS HEBDOMADAIRES DES SEANCES DE L ACADEMIE DES SCIENCES SERIE B, 1974, 279 (02): : 21 - 24
[43] OPTICAL DIAGNOSTICS AND KINETICS OF LOW-PRESSURE PLASMA REACTORS
GARSCADDEN, A
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1986, 3 (13): : P60 - P60
[44] Simple model for calculating the rate constants of plasma-chemical reactions in low-pressure DC magnetron discharges
60 Hilltop Lane, St. Paul, MS 55116, United States
Plasma Chem. Plasma Process., 2 (181-187):
[45] Simple Model for Calculating the Rate Constants of Plasma-Chemical Reactions in Low-Pressure DC Magnetron Discharges
L. Pekker
Plasma Chemistry and Plasma Processing, 1998, 18 : 181 - 187
[46] Simple model for calculating the rate constants of plasma-chemical reactions in low-pressure DC magnetron discharges
Pekker, L
PLASMA CHEMISTRY AND PLASMA PROCESSING, 1998, 18 (02) : 181 - 187
[47] ON THE SCALING AND THE STABILITY OF BURNING OF PLASMA-CHEMICAL HIGH-FREQUENCY INDUCTION DISCHARGES IN A GAS-FLOW
PETRUSEV, AS
POTAPKIN, BV
RUSANOV, VD
FRIDMAN, AA
HIGH TEMPERATURE, 1990, 28 (06) : 808 - 815
[48] The effect of the driving frequency on the confinement of beam electrons and plasma density in low-pressure capacitive discharges
Wilczek, S.
Trieschmann, J.
Schulze, J.
Schuengel, E.
Brinkmann, R. P.
Derzsi, A.
Korolov, I.
Donko, Z.
Mussenbrock, T.
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2015, 24 (02):
[49] SYMMETRY OF HIGH-FREQUENCY PLASMA MOTIONS.
Zhmudskii, A.A.
Taranov, V.B.
Soviet Physics, Technical Physics (English translation of Zhurnal Tekhnicheskoi Fiziki), 1974, 19 (06): : 717 - 718
[50] DECOMPOSITION OF METHANE BY HIGH-FREQUENCY DISCHARGES UNDER LOW-PRESSURE AND IN STATIC CONDITIONS
SZYMANSKI, A
SOWADSKI, J
ZEITSCHRIFT FUR PHYSIKALISCHE CHEMIE-LEIPZIG, 1975, 256 (02): : 299 - 304

← 1 2 3 4 5 →