ON-MEMS-CHIP COMPACT TEMPERATURE SENSOR FOR LARGE-VOLUME, LOW-COST SENSOR CALIBRATION

被引：2

作者：

Frigerio, Paolo ^{[1
]}

Fagnani, Andrea ^{[1
]}

Zega, Valentina ^{[1
]}

Gattere, Gabriele ^{[2
]}

Frangi, Attilio ^{[1
]}

Langfelder, Giacomo ^{[1
]}

机构：

[1] Politecn Milan, Milan, Italy

[2] STMicroelect, Cornaredo, Italy

来源：

2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | 2023年

关键词：

MEMS; multi-mode resonators; temperature sensors; temperature coefficient of frequency;

D O I：

10.1109/MEMS49605.2023.10052513

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The work introduces a MEMS temperature sensor for use in the same module of other sensors, to provide optimal measurements for their thermal calibration/compensation purposes. The sensor, made of 25-mu m-thick, lowly-doped, epitaxial polysilicon, relies on a multi-mode resonator, where the frequency ratio is used to extract relative temperature changes without the need of an external absolute time reference. Measurements across the [5-85]degrees C range validate the predictions of the frequency behavior, enabling to estimate +/- 50 mK(rms) resolution at 4-Hz data rate.

引用

页码：989 / 992

页数：4

共 50 条

[1] A Low-Cost Compact Soft Tactile Sensor with a Multimodal Chip
Al, Gorkem Anil
Martinez-Hernandez, Uriel
[J]. 2021 20TH INTERNATIONAL CONFERENCE ON ADVANCED ROBOTICS (ICAR), 2021, : 13 - 18
[2] The calibration and deployment of a low-cost methane sensor
Riddick, Stuart N.
Mauzerall, Denise L.
Celia, Michael
Allen, Grant
Pitt, Joseph
Kang, Mary
Riddick, John C.
[J]. ATMOSPHERIC ENVIRONMENT, 2020, 230
[3] Evaluation of Low-cost AirQuality Sensor Calibration Models
Aula, Kasimir
Lagerspetz, Eemil
Nurmi, Petteri
Tarkoma, Sasu
[J]. ACM TRANSACTIONS ON SENSOR NETWORKS, 2022, 18 (04)
[4] LOW-COST TOOLING FOR LARGE-VOLUME PRODUCTION OF PLASTICS COMPONENTS
不详
[J]. MACHINERY AND PRODUCTION ENGINEERING, 1973, 123 (3168): : 171 - 172
[5] LOW-COST, LARGE-VOLUME AIR SUPPLY FOR EXPERIMENTAL TANKS
CRUNKILTON, R
LEGRANDE, W
[J]. PROGRESSIVE FISH-CULTURIST, 1978, 40 (02): : 75 - 76
[6] A low-cost, large-volume general purpose water sampler
Grayson, RP
Plater, AJ
[J]. JOURNAL OF PALEOLIMNOLOGY, 2005, 33 (01) : 123 - 128
[7] A low-cost, large-volume general purpose water sampler
R. P. Grayson
A. J. Plater
[J]. Journal of Paleolimnology, 2005, 33 : 123 - 128
[8] Optical low-cost temperature point sensor
Helmig, C
Teunissen, J
[J]. APPLICATIONS OF OPTICAL FIBER SENSORS, 2000, 4074 : 194 - 201
[9] A LOW-COST DIGITAL TEMPERATURE SENSOR SYSTEM
ZIEGLER, H
[J]. SENSORS AND ACTUATORS, 1984, 5 (02): : 169 - 178
[10] Purely Inertial Navigation with a Low-Cost MEMS Sensor Array
Blocher, Lukas
Mayer, Wolfram
Arena, Marco
Radovic, Dusan
Hiller, Tobias
Gerlach, Joachim
Bringmann, Oliver
[J]. 2021 8TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (INERTIAL 2021), 2021,

← 1 2 3 4 5 →