Direct synthesis of MoS2 films on flexible substrates at low temperature

被引：0
|
作者：
Ahn, Jong-Hyun [1 ]
机构：
[1] Yonsei Univ, Seoul, South Korea
来源：
NATURE NANOTECHNOLOGY | 2023年 / 18卷 / 12期
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
D O I：
10.1038/s41565-023-01465-5
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Monolayer MoS2, a two-dimensional semiconductor, was directly synthesized on polymer and ultrathin-glass substrates at 150 & DEG;C using a metal-organic chemical vapour deposition strategy. The high-quality MoS2 films enabled the construction of various integrated circuits on flexible substrates without the need for an additional transfer process.
引用
收藏
页码：1381 / 1382
页数：2
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