Influence of methane flow ratios on the structural and mechanical properties of Ti-doped diamond-like carbon films

被引:0
|
作者
Lee, Wei-Hsiang [1 ,2 ]
Hu, Chih-Chung [3 ]
Sun, Yin-Tung Alber [1 ,2 ]
Wang, Bo-Yuan [4 ]
Chang, Ho [5 ]
Hsu, Chun-Yao [4 ]
机构
[1] Natl Taipei Univ Technol, Grad Inst Mfg Technol, Taipei, Taiwan
[2] Natl Taipei Univ Technol, Dept Mech Engn, Taipei 10608, Taiwan
[3] Ming Chi Univ Technol, Dept Mech Engn, Taipei, Taiwan
[4] Lunghwa Univ Sci & Technol, Dept Mech Engn, Taoyuan Cty 33306, Taiwan
[5] Minghsin Univ Sci & Technol, Dept Semicond & Electroopt Technol, Hsinchu 30401, Taiwan
来源
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY | 2023年 / 129卷 / 3-4期
关键词
Diamond-like carbon; Sputtering; Methane ratios; Milling performance; THIN-FILM; DLC FILMS; OPTIMIZATION; PERFORMANCE; COATINGS; FREQUENCY; ARC;
D O I
10.1007/s00170-023-12368-z
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Diamond-like carbon films with Ti dopant (Ti-DLC) are synthesized by reactive magnetron sputtering using a pure Ti metal target. This study determines the effect of methane flow ratios (Rm=CH4/(Ar + CH4), ranging from 4 to 12%) on the surface morphology, microstructure, mechanical properties, and cermet cutting tool insert features of Ti-DLC films. The GIXRD diffraction spectrum for Ti-DLC film depicts an amorphous structure. There are peaks for nano-crystalline TiC at 2 theta values of 35.88 degrees, 41.52 degrees, and 60.14 degrees, which respectively correspond to the (111), (200), and (220) planes of the face-centered cubic structure. The characteristic binding energy of C 1s, Ti 2p, and O 1s for Ti-DLC film is determined using a high-resolution XPS spectrum. Increasing Rm flow ratio (reducing Ti metal doping) increases the intensity of the Raman spectrum because there is an increased sp2-C (sp2/sp3 ratio) site fraction for DLC components. The experimental results show that the hardness of the DLC film increases from 11.07 to 14.76 GPa as the Rm flow ratio is increased from 4 to 12%. The adhesive strength of the Ti-DLC film coating is measured using a scratch test and shows that the film adheres well to the substrate. The Ti-DLC films are coated onto cutter inserts for the dry milling of an Inconel 718 workpiece, and the results show that all coated tools have a significantly longer tool life than uncoated tools.
引用
收藏
页码:1145 / 1157
页数:13
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