Anti-crosstalk absolute phase retrieval method for microscopic fringe projection profilometry using temporal frequency-division multiplexing

被引:5
|
作者
Wang, Dezhao [1 ,2 ]
Zhou, Weihu [1 ,2 ,3 ]
Zhang, Zili [2 ,3 ]
Kang, Yanhui [4 ]
Meng, Fanchang [2 ]
Wang, Na [2 ,5 ]
机构
[1] Changchun Univ Sci & Technol, Coll Optoelect Engn, Changchun 130022, Jilin, Peoples R China
[2] Chinese Acad Sci, Inst Microelect, Photoelect Technol R&D Ctr, Beijing 100029, Peoples R China
[3] Univ Chinese Acad Sci, Beijing 100029, Peoples R China
[4] Natl Inst Metrol, Div Dimens Metrol, 18 Beisanhuandonglu, Beijing 100029, Peoples R China
[5] Hefei Univ Technol, Sch Instrument Sci & Optoelect Engn, Hefei 230009, Anhui, Peoples R China
关键词
ERROR-CORRECTION; ELIMINATION; ALGORITHM;
D O I
10.1364/OE.506370
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
In microscopic fringe projection profilometry (MFPP), the traditional absolute phase retrieval method using composite frequency fringe has the shortcomings of low accuracy and poor robustness due to mutual crosstalk of harmonic from the different channels of frequency-division multiplexing. In this study, an absolute phase retrieval method that avoids the inter-channel crosstalk is proposed. By introducing guard bands to accommodate the frequency channels corresponding to the second harmonic that dominate the high order harmonics, the aliasing between the second harmonic and the fundamental is eliminated. Consequently, phase maps without crosstalk can be demodulated using appropriate phase-shifting algorithms. The proposed method is well-suited for high-precision three-dimensional shape measurement scenarios in many fields such as integrated circuit manufacturing process control and micro-electro-mechanical system quality inspection. The experiment results demonstrate that the anti-crosstalk method is effective and can realize three-dimensional reconstruction for discontinuous planar surface and spherical surface.
引用
收藏
页码:39528 / 39545
页数:18
相关论文
共 36 条
  • [21] A robust phase unwrapping method for phase shifting coding high-frequency color fringe projection profilometry
    Zhang, Bingwei
    Jiang, Kaiyong
    Lin, Junyi
    Lu, Ping
    OPTICS COMMUNICATIONS, 2024, 558
  • [22] Arbitrary phase shifting method for fiber-optic fringe projection profilometry based on temporal sinusoidal phase modulation
    Huang, Tingting
    Li, Xiuming
    Fu, Xiao
    Zhang, Cong
    Duan, Fajie
    Jiang, Jiajia
    OPTICS AND LASERS IN ENGINEERING, 2019, 121 : 300 - 306
  • [23] Absolute phase recovery based on two-wavelength fringes using a defocusing technique in fringe projection profilometry
    Deng, Wenbin
    OPTICAL ENGINEERING, 2020, 59 (06)
  • [24] Absolute Phase Retrieval Using One Coded Pattern and Geometric Constraints of Fringe Projection System
    Yang, Xu
    Zeng, Chunnian
    Luo, Jie
    Lei, Yu
    Tao, Bo
    Chen, Xiangcheng
    APPLIED SCIENCES-BASEL, 2018, 8 (12):
  • [25] A Y-shaped network based single-shot absolute phase recovery method for fringe projection profilometry
    Tan, Hailong
    Xu, Yuanping
    Zhang, Chaolong
    Xu, Zhijie
    Kong, Chao
    Tang, Dan
    Guo, Benjun
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2024, 35 (03)
  • [26] Phase extraction accuracy comparison based on multi-frequency phase-shifting method in fringe projection profilometry
    Wang, Jianhua
    Yang, Yanxi
    MEASUREMENT, 2022, 199
  • [27] A Statistic Method of Project Nonlinearity Correction in Multi-frequency Phase-shifting Fringe Projection Profilometry
    Xing, Shuo
    Guo, Hongwei
    SIXTH INTERNATIONAL CONFERENCE ON OPTICAL AND PHOTONIC ENGINEERING (ICOPEN 2018), 2018, 10827
  • [28] Single-Model Self-Recovering Fringe Projection Profilometry Absolute Phase Recovery Method Based on Deep Learning
    Li, Xu
    Shen, Yihao
    Meng, Qifu
    Xing, Mingyi
    Zhang, Qiushuang
    Yang, Hualin
    SENSORS, 2025, 25 (05)
  • [29] Profilometry without phase unwrapping using multi-frequency and four-step phase-shift sinusoidal fringe projection
    Kim, Eun-Hee
    Hahn, Joonku
    Kim, Hwi
    Lee, Byoungho
    OPTICS EXPRESS, 2009, 17 (10): : 7818 - 7830
  • [30] Absolute phase retrieval of shiny objects using fringe projection and deep learning with computer-graphics-based images
    Ueda, Kazumasa
    Ikeda, Kanami
    Koyama, Osanori
    Yamada, Makoto
    APPLIED OPTICS, 2022, 61 (10) : 2750 - 2756