Anti-crosstalk absolute phase retrieval method for microscopic fringe projection profilometry using temporal frequency-division multiplexing

被引:5
|
作者
Wang, Dezhao [1 ,2 ]
Zhou, Weihu [1 ,2 ,3 ]
Zhang, Zili [2 ,3 ]
Kang, Yanhui [4 ]
Meng, Fanchang [2 ]
Wang, Na [2 ,5 ]
机构
[1] Changchun Univ Sci & Technol, Coll Optoelect Engn, Changchun 130022, Jilin, Peoples R China
[2] Chinese Acad Sci, Inst Microelect, Photoelect Technol R&D Ctr, Beijing 100029, Peoples R China
[3] Univ Chinese Acad Sci, Beijing 100029, Peoples R China
[4] Natl Inst Metrol, Div Dimens Metrol, 18 Beisanhuandonglu, Beijing 100029, Peoples R China
[5] Hefei Univ Technol, Sch Instrument Sci & Optoelect Engn, Hefei 230009, Anhui, Peoples R China
关键词
ERROR-CORRECTION; ELIMINATION; ALGORITHM;
D O I
10.1364/OE.506370
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
In microscopic fringe projection profilometry (MFPP), the traditional absolute phase retrieval method using composite frequency fringe has the shortcomings of low accuracy and poor robustness due to mutual crosstalk of harmonic from the different channels of frequency-division multiplexing. In this study, an absolute phase retrieval method that avoids the inter-channel crosstalk is proposed. By introducing guard bands to accommodate the frequency channels corresponding to the second harmonic that dominate the high order harmonics, the aliasing between the second harmonic and the fundamental is eliminated. Consequently, phase maps without crosstalk can be demodulated using appropriate phase-shifting algorithms. The proposed method is well-suited for high-precision three-dimensional shape measurement scenarios in many fields such as integrated circuit manufacturing process control and micro-electro-mechanical system quality inspection. The experiment results demonstrate that the anti-crosstalk method is effective and can realize three-dimensional reconstruction for discontinuous planar surface and spherical surface.
引用
收藏
页码:39528 / 39545
页数:18
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