A spectrally selective visible microbolometer based on planar subwavelength thin films

被引:2
|
作者
Xu, Qianqian [1 ,2 ]
Zhou, Ziji [1 ,2 ]
Tan, Chong [1 ,2 ]
Pan, Xiaohang [1 ]
Wen, Zhengji [1 ]
Zhang, Jinguo [1 ,3 ]
Zhou, Dongjie [1 ,2 ]
Sun, Yan [1 ]
Chen, Xin [1 ]
Zhou, Lei [4 ,5 ]
Dai, Ning [1 ,6 ]
Chu, Junhao [1 ,3 ]
Hao, Jiaming [1 ,3 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Tech Phys, State Key Lab Infrared Phys, Shanghai 200083, Peoples R China
[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[3] Fudan Univ, Inst Optoelect, Shanghai Frontiers Sci Res Base Intelligent Optoel, Shanghai 200433, Peoples R China
[4] Fudan Univ, State Key Lab Surface Phys, Shanghai 200433, Peoples R China
[5] Fudan Univ, Phys Dept, Key Lab Micro & Nano Photon Struct, Minist Educ, Shanghai 200433, Peoples R China
[6] Univ Chinese Acad Sci, Hangzhou Inst Adv Study, Hangzhou 310024, Peoples R China
来源
NANOSCALE ADVANCES | 2023年 / 5卷 / 07期
基金
中国博士后科学基金; 国家重点研发计划; 中国国家自然科学基金;
关键词
AMORPHOUS-SILICON; BOLOMETER;
D O I
10.1039/d2na00937d
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
In this work, we experimentally demonstrate a new type of compact, low-cost, visible microbolometer based on metal-insulator-metal (MIM) planar subwavelength thin films, which exploits resonant absorption for spectral selectivity without additional filters and has the advantages of compact design, simple structure, cost-efficiency, and large format fabrication. The experimental results show that a proof-of-principle microbolometer exhibits spectrally selective properties in the visible frequency range. At a resonant absorption wavelength of 638 nm, a responsivity of about 10 mV W-1 is achieved at room temperature at a bias current of 0.2 mA, which is about one order of magnitude higher than that of the control device (a bare Au bolometer). Our proposed approach provides a viable solution for the development of compact and inexpensive detectors.
引用
收藏
页码:2054 / 2060
页数:7
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