High Operating Temperature Mid-Infrared InGaAs/GaAs Submonolayer Quantum Dot Quantum Cascade Detectors on Silicon

被引:7
|
作者
Guo, Daqian [1 ]
Huang, Jian [2 ]
Benamara, Mourad [3 ]
Mazur, Yuriy I. [3 ]
Deng, Zhuo [2 ]
Salamo, Gregory J. [3 ]
Liu, Huiyun [4 ]
Chen, Baile [2 ]
Wu, Jiang [1 ]
机构
[1] Univ Elect Sci & Technol China, Inst Fundamental & Frontier Sci, Chengdu 610054, Peoples R China
[2] ShanghaiTech Univ, Sch Informat Sci & Technol, Optoelect Devices Lab, Shanghai 201210, Peoples R China
[3] Univ Arkansas, Inst Nanosci & Engn, Fayetteville, AR 72701 USA
[4] UCL, Dept Elect & Elect Engn, London WC1E 7JE, England
基金
中国国家自然科学基金; 英国工程与自然科学研究理事会;
关键词
Silicon; Gallium arsenide; Substrates; Detectors; Strain; Quantum dots; Quantum cascade lasers; Submonolayer quantum dots; quantum cascade detectors; silicon; molecular beam epitaxy; PHOTODETECTORS; SI;
D O I
10.1109/JQE.2023.3238754
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Monolithic integration of infrared photodetectors on a silicon platform is a promising solution for the development of scalable and affordable photodetectors and infrared focal plane arrays. We report on integration of submonolayer quantum dot quantum cascade detectors (SML QD QCDs) on Si substrates via direct growth. Threading dislocation density has been reduced to the level of similar to 10(7) cm(-2) with the high-quality GaAs-on-Si virtual substrate. We also conducted a morphology analysis for the SML QD QCDs through a transmission electron microscope strain contrast image and to the best of our knowledge, high quality InGaAs/GaAs SML QDs were clearly observed on silicon for the first time. Photoluminescence decay time of the as-grown SML QD QCDs on Si was measured to be around 300 ps, which is comparable to the reference QCDs on lattice-matched GaAs substrates. With the high-quality III-V epitaxial layers and SML QDs, the quantum cascade detectors on Si achieved a normal incident photoresponse temperature up to 160 K under zero bias.
引用
收藏
页数:6
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