Effect of X-Ray Irradiation on Colloidal Quantum Dot SWIR CMOS Image Sensor

被引:1
|
作者
Jin, Minhyun [1 ,2 ]
Lee, Sang Yeon [1 ]
Santos, Pedro [3 ]
Kang, Jubin [1 ,4 ]
Georgitzikis, Epimitheas [1 ]
Kim, Joo Hyoung [1 ]
Genoe, Jan [1 ]
Kim, Soo Youn [2 ]
Meynants, Guy [3 ]
Malinowski, Pawel E. [1 ]
Lee, Jiwon [1 ,5 ,6 ]
机构
[1] IMEC, B-3001 Leuven, Belgium
[2] Dongguk Univ, Dept Semicond Sci, Seoul 04620, South Korea
[3] Katholieke Univ Leuven, Dept Elect Engn, B-2440 Geel, Belgium
[4] Ulsan Natl Inst Sci & Technol, Dept Elect Engn, Ulsan 44919, South Korea
[5] Hanyang Univ ERICA, Dept Photon & Nanoelect, Ansan 15588, Gyeonggi Do, South Korea
[6] Hanyang Univ ERICA, BK21 FOUR ERICA ACE Ctr, Ansan 15588, Gyeonggi Do, South Korea
关键词
Dark current; Radiation effects; X-ray imaging; Temperature measurement; Current measurement; Wavelength measurement; Silicon; Quantum dot (QD) complementary metal-oxide semiconductor (CMOS) image sensor (QD-CIS); total ionizing dose (TID); X-ray radiation effect; INDUCED DARK CURRENT; RADIATION;
D O I
10.1109/TED.2023.3329452
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this article, the X-ray radiation effects on colloidal quantum dot photodiode (QDPD)-based short-wave infrared (SWIR) complementary metal-oxide semiconductor image sensors (QD-CISs) are studied. Individual QDPD, silicon readout IC (Si-ROIC), and QD-CIS are evaluated together for a comprehensive analysis. The dark current, activation energy, and external quantum efficiency (EQE) of samples are investigated before and after irradiating with 58.2 keV of X-ray radiation, which has a different total ionizing dose (TID) range from 22 to 220 krad. X-ray irradiation on Si-ROIC induces mid-band gap trap states and increases the dark current according to the increasing TID. However, for the QDPD, despite an increase in the TID, the dark current reduces and the EQE slightly enhances at the SWIR wavelength. The QD-CIS shows a decrease in the dark current like the QDPD results, as the TID increases. The activation energy of QD-CIS rarely changes regardless of TID amounts. The X-ray radiation effect on QDPD results in enhanced performance, and this effect continues in the integrated QD-CIS, whereas the effect of Si-ROIC degradation is minor in the current experimental range. Thus, these findings provide significant insights into the utilization of QD-CIS in various X-ray applications.
引用
收藏
页码:613 / 618
页数:6
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