Planar InAlAs/InGaAs avalanche photodiode with 360 GHz gainxbandwidth product

被引:2
|
作者
Wang, Shuai [1 ,2 ]
Ye, Han [1 ,2 ]
Geng, Li-Yan [1 ,2 ]
Xiao, Fan [1 ,2 ]
Chu, Yi-Miao [1 ,2 ]
Zheng, Yu [1 ,2 ]
Han, Qin [1 ,2 ]
机构
[1] Chinese Acad Sci, Inst Semicond, Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
[2] Univ Chinese Acad Sci, Sch Elect Elect & Commun Engn, Beijing 100049, Peoples R China
关键词
avalanche photodiode; planar; gainxbandwidth product; dark current; 85.60.Gz; 73.40.Kp; 81.15.Hi; LOW DARK CURRENT; BANDWIDTH PRODUCT; INP;
D O I
10.1088/1674-1056/ace61b
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
This paper describes a guardring-free planar InAlAs/InGaAs avalanche photodiode (APD) by computational simulations and experimental results. The APD adopts the structure of separate absorption, charge, and multiplication (SACM) with top-illuminated. Computational simulations demonstrate how edge breakdown effect is suppressed in the guardring-free structure. The fabricated APD experiment results show that it can obtain a very low dark current while achieving a high gainxbandwidth (GB) product. The dark current is 3 nA at 0.9Vbr, and the unit responsivity is 0.4 A/W. The maximum 3 dB bandwidth of 24 GHz and a GB product of 360 GHz are achieved for the fabricated APD operating at 1.55 mu m.
引用
收藏
页数:5
相关论文
共 50 条
  • [41] MOCVD BASED ZINC DIFFUSION PROCESS FOR PLANAR InP/InGaAs AVALANCHE PHOTODIODE FABRICATION
    Pitts, O. J.
    Hisko, M.
    Benyon, W.
    SpringThorpe, A. J.
    2012 INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS (IPRM), 2013, : 225 - 228
  • [42] A PLANAR INP/INGAAS AVALANCHE PHOTODIODE WITH FLOATING GUARD RING AND DOUBLE DIFFUSED JUNCTION
    LIU, Y
    FORREST, SR
    HLADKY, J
    LANGE, MJ
    ACKLEY, DE
    JOURNAL OF LIGHTWAVE TECHNOLOGY, 1992, 10 (02) : 182 - 193
  • [43] A planar InGaAs/InP Geiger mode avalanche photodiode with cascade edge breakdown suppression
    Stale Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
    Pan Tao Ti Hsueh Pao, 2008, 9 (1686-1691):
  • [44] 2D Simulation of Planar InP/InGaAs Avalanche Photodiode with No Guard Rings
    Malyshev, S. A.
    Chizh, A. L.
    Vasileuski, Y. G.
    NUSOD '08: PROCEEDINGS OF THE 8TH INTERNATIONAL CONFERENCE ON NUMERICAL SIMULATION OF OPTOELECTRONIC DEVICES, 2008, : 81 - 82
  • [45] 1.25 GHz Single-photon Detection with Sinusoidally Gated InGaAs/InP Avalanche Photodiode
    Chen, Yuanjin
    Huang, Zinan
    Bai, Guomin
    Zeng, Heping
    Liang, Yan
    Proceedings of the 2016 4th International Conference on Machinery, Materials and Information Technology Applications, 2016, 71 : 1706 - 1709
  • [46] Suppression of avalanche multiplication at the periphery of diffused junction by floating guard rings in a planar InGaAs-InP avalanche photodiode
    Cho, SR
    Yang, SK
    Ma, JA
    Lee, SD
    Yu, JS
    Choo, AG
    Kim, TI
    Burm, J
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2000, 12 (05) : 534 - 536
  • [47] Theoretical Studies on InGaAs/InAlAs SAGCM Avalanche Photodiodes
    Siyu Cao
    Yue Zhao
    Sajid ur Rehman
    Shuai Feng
    Yuhua Zuo
    Chuanbo Li
    Lichun Zhang
    Buwen Cheng
    Qiming Wang
    Nanoscale Research Letters, 2018, 13
  • [48] External electroluminescence measurements of InGaAs/InAlAs avalanche photodiodes
    Finkelstein, Hod
    Zlatanovic, Sanja
    Lo, Yu-Hwa
    Esener, Sadik C.
    Zhao, Kai
    APPLIED PHYSICS LETTERS, 2007, 91 (24)
  • [49] Study of InGaAs/InAlAs Avalanche Photodiodes Grown on InP
    Zheng, Da-Nong
    Xu, Ying-Qiang
    Ni, Hai-Qiao
    Niu, Zhi-Chuan
    INFRARED, MILLIMETER-WAVE, AND TERAHERTZ TECHNOLOGIES V, 2018, 10826
  • [50] Mushroom Mesa Structure for InAlAs–InGaAs Avalanche Photodiodes
    N. A. Maleev
    A. G. Kuzmenkov
    M. M. Kulagina
    A. P. Vasyl’ev
    S. A. Blokhin
    S. I. Troshkov
    A. V. Nashchekin
    M. A. Bobrov
    A. A. Blokhin
    K. O. Voropaev
    V. E. Bugrov
    V. M. Ustinov
    Technical Physics Letters, 2023, 49 : S215 - S218