Study on the Rate of the Removal of Nano-Crystalline Diamond-Coated Materials by Femtosecond Laser Etching

被引:1
|
作者
Ren, Lujun [1 ]
Ma, Yuping [1 ]
Cao, Haisong [1 ]
Zhang, Xingxing [1 ]
Han, Yuan [1 ]
Wei, Chao [1 ,2 ]
机构
[1] Anhui Jianzhu Univ, Sch Mech & Elect Engn, Hefei 230601, Peoples R China
[2] Soochow Univ, Sch Mech & Elect Engn, Suzhou 215031, Peoples R China
来源
APPLIED SCIENCES-BASEL | 2023年 / 13卷 / 17期
关键词
laser optics; ultrafast optics; nano-crystalline diamond coating; ablation; material removal rate; SUPERHYDROPHOBIC SURFACES; PULSED-LASER; ABLATION; FILMS;
D O I
10.3390/app13179864
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The rate of the removal of materials coated with nano-crystalline diamonds by femtosecond laser etching was examined by adjusting the repetition rate of the femtosecond laser, the energy-flux density of the concentrated spot, and the scanning speed. The observational results of the white-light interferometer and the numerical fitting approach were used to develop the removal rate function model of the nano-crystalline diamond-covered material etched by the femtosecond laser. The findings demonstrated that the rate of material removal was not greatly affected by the repetition frequency and that the amount of laser energy accumulated over time on the coated surface is steady. The processing outcomes under different laser scanning speeds are different, and the material removal rate tends to increase and then decrease with an increase in scanning speed. The greater the energy-flux density of the focused spot, the greater the etching intensity, and the greater the material removal rate. With an increase in scanning speed, the rate at which the material is removed often rises initially before falling.
引用
收藏
页数:15
相关论文
共 36 条
  • [31] Simulation study of reduced self-heating in β-Ga2O3 MOSFET on a nano-crystalline diamond substrate
    Oh, J.
    Ma, J.
    Yoo, G.
    RESULTS IN PHYSICS, 2019, 13
  • [32] Machining performance of hard-brittle materials by multi-layer micro-nano crystalline diamond coated tools
    Yan, Guangyu
    Wu, Yuhou
    Cristea, Daniel
    Lu, Feng
    Wang, Yibao
    Zhao, Dehong
    Tierean, Mircea
    Liu, Lusheng
    RESULTS IN PHYSICS, 2019, 13
  • [33] The study of the defect removal etching of black silicon for diamond wire sawn multi-crystalline silicon solar cells
    Su, Guoyu
    Dai, Xiaowan
    Tao, Ke
    Sun, Hengchao
    Jia, Rui
    Jin, Zhi
    Liu, Xinyu
    Liu, Hongzhi
    Liu, Shouqiang
    Xu, Chun
    Cao, Yujia
    Zhao, Yan
    Qu, Hui
    Liu, Bin
    Chen, Bihua
    SOLAR ENERGY, 2018, 170 : 95 - 101
  • [34] Study on the Superhydrophobic Properties of Micro/Nano Hole Structure on the Surface of Glass Fiber Reinforced Plastics Based on Femtosecond Laser Etching
    Wang, Ji
    Wang, Guolong
    Zhu, Zhenkai
    Zhang, Wenwu
    NANOMATERIALS, 2025, 15 (04)
  • [35] Study of Raman Spectra of Nano-crystalline Diamond Like Carbon (DLC) films Composition (sp2:sp3) with Substrate Temperature
    Yadav, Vikram S.
    Sahu, Devendra K.
    Singh, Manveer
    Kumar, Kuldeep
    WCECS 2009: WORLD CONGRESS ON ENGINEERING AND COMPUTER SCIENCE, VOLS I AND II, 2009, : 78 - +
  • [36] Study on Li+-ion diffusion in nano-crystalline LiMn2O4 thin film cathode grown by pulsed laser deposition using CV, EIS and PITT techniques
    Tang, S. B.
    Lai, M. O.
    Lu, L.
    MATERIALS CHEMISTRY AND PHYSICS, 2008, 111 (01) : 149 - 153