The rate of the removal of materials coated with nano-crystalline diamonds by femtosecond laser etching was examined by adjusting the repetition rate of the femtosecond laser, the energy-flux density of the concentrated spot, and the scanning speed. The observational results of the white-light interferometer and the numerical fitting approach were used to develop the removal rate function model of the nano-crystalline diamond-covered material etched by the femtosecond laser. The findings demonstrated that the rate of material removal was not greatly affected by the repetition frequency and that the amount of laser energy accumulated over time on the coated surface is steady. The processing outcomes under different laser scanning speeds are different, and the material removal rate tends to increase and then decrease with an increase in scanning speed. The greater the energy-flux density of the focused spot, the greater the etching intensity, and the greater the material removal rate. With an increase in scanning speed, the rate at which the material is removed often rises initially before falling.
机构:
Shenyang Jianzhu Univ, Fac Mech Engn, Shenyang 110168, Liaoning, Peoples R ChinaShenyang Jianzhu Univ, Fac Mech Engn, Shenyang 110168, Liaoning, Peoples R China
Yan, Guangyu
Wu, Yuhou
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Shenyang Jianzhu Univ, Fac Mech Engn, Shenyang 110168, Liaoning, Peoples R ChinaShenyang Jianzhu Univ, Fac Mech Engn, Shenyang 110168, Liaoning, Peoples R China
Wu, Yuhou
Cristea, Daniel
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Transilvania Univ, Dept Mat Sci, Brasov 500036, RomaniaShenyang Jianzhu Univ, Fac Mech Engn, Shenyang 110168, Liaoning, Peoples R China
Cristea, Daniel
Lu, Feng
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Shenyang Jianzhu Univ, Fac Mech Engn, Shenyang 110168, Liaoning, Peoples R ChinaShenyang Jianzhu Univ, Fac Mech Engn, Shenyang 110168, Liaoning, Peoples R China
Lu, Feng
Wang, Yibao
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Chinese Acad Sci, Shenyang Natl Lab Mat Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R ChinaShenyang Jianzhu Univ, Fac Mech Engn, Shenyang 110168, Liaoning, Peoples R China
Wang, Yibao
Zhao, Dehong
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Shenyang Jianzhu Univ, Fac Mech Engn, Shenyang 110168, Liaoning, Peoples R ChinaShenyang Jianzhu Univ, Fac Mech Engn, Shenyang 110168, Liaoning, Peoples R China
Zhao, Dehong
Tierean, Mircea
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Transilvania Univ, Mat Engn & Welding Dept, Brasov 500036, RomaniaShenyang Jianzhu Univ, Fac Mech Engn, Shenyang 110168, Liaoning, Peoples R China
Tierean, Mircea
Liu, Lusheng
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Chinese Acad Sci, Shenyang Natl Lab Mat Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R ChinaShenyang Jianzhu Univ, Fac Mech Engn, Shenyang 110168, Liaoning, Peoples R China
机构:
Chinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R China
Jiangsu R&D Ctr Internet Things, 200 Ling Hu Ave, Changshu 214028, Jiangsu, Peoples R China
Univ Chinese Acad Sci, Beijing 100049, Peoples R ChinaChinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R China
Su, Guoyu
Dai, Xiaowan
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Chinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R China
Dai, Xiaowan
Tao, Ke
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Chinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R China
Tao, Ke
Sun, Hengchao
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Chinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R China
Sun, Hengchao
Jia, Rui
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Chinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R China
Jia, Rui
Jin, Zhi
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Chinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R China
Jin, Zhi
Liu, Xinyu
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Chinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R ChinaChinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R China
Liu, Xinyu
Liu, Hongzhi
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Beijing Zhongkexin Elect Equipment Co Ltd, Beijing, Peoples R ChinaChinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R China
Liu, Hongzhi
Liu, Shouqiang
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Beijing Zhongkexin Elect Equipment Co Ltd, Beijing, Peoples R ChinaChinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R China
Liu, Shouqiang
Xu, Chun
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Jiangsu Shunfeng Photovolta Technol CO LTD, Changshu, Jiangsu, Peoples R ChinaChinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R China
Xu, Chun
Cao, Yujia
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Jiangsu Shunfeng Photovolta Technol CO LTD, Changshu, Jiangsu, Peoples R ChinaChinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R China
Cao, Yujia
Zhao, Yan
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Jiangsu Shunfeng Photovolta Technol CO LTD, Changshu, Jiangsu, Peoples R ChinaChinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R China
Zhao, Yan
Qu, Hui
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Jiangsu Shunfeng Photovolta Technol CO LTD, Changshu, Jiangsu, Peoples R ChinaChinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R China
Qu, Hui
Liu, Bin
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Jiangsu Shunfeng Photovolta Technol CO LTD, Changshu, Jiangsu, Peoples R ChinaChinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R China
Liu, Bin
Chen, Bihua
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Jiangsu Shunfeng Photovolta Technol CO LTD, Changshu, Jiangsu, Peoples R ChinaChinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R China
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Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Peoples R China
Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R ChinaChinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Peoples R China
Wang, Ji
Wang, Guolong
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Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Peoples R China
Zhejiang Univ Technol, Coll Mech Engn, Hangzhou 310014, Peoples R ChinaChinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Peoples R China
Wang, Guolong
Zhu, Zhenkai
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Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Peoples R China
Zhejiang Univ Technol, Coll Mech Engn, Hangzhou 310014, Peoples R ChinaChinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Peoples R China
Zhu, Zhenkai
Zhang, Wenwu
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Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Peoples R ChinaChinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Peoples R China