The impact of hydrogen plasma on the structure and morphology of tin and lead micrometer sized particles

被引：8

作者：

Shefer, D. ^{[1
]}

Nikipelov, A. ^{[2
]}

van de Kerkhof, M. ^{[2
]}

Marvi, Z. ^{[2
]}

Banine, V ^{[1
,2
]}

Beckers, J. ^{[1
]}

机构：

[1] Eindhoven Univ Technol, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands

[2] The ASML, NL-5504 DR Veldhoven, Netherlands

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2023年 / 56卷 / 08期

关键词：

EUV plasma; hydrogen plasma; contamination; tin; lead; particles; DECOMPOSITION; ALUMINUM; BUBBLES; SPECTRA;

D O I：

10.1088/1361-6463/acb3d9

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The stability of micrometer sized particles in hydrogen plasma is essential for extreme ultraviolet lithography, the ITER fusion program and the application of hydrogen plasma etching. We experimentally investigated the morphological evolution of tin (Sn), lead (Pb), and lead (II) oxide (PbO) micrometer sized particles on a surface that is exposed to a low pressure hydrogen plasma. Post exposure particle cross sections obtained by a scanning electron microscope accompanied by a focused ion beam demonstrated a significant influence of hydrogen plasma exposure on both the surface and the bulk material of the particles. Chemical sputtering at the surface and accumulation of pressurized hydrogen bubbles in cavities in the bulk material are the main drivers of the morphological changes. These mechanisms may influence the adhesion of particles to the surface through the introduction of asperities, increase of contact spot area, or fragmentation after the accumulation of mechanical stress.

引用

页数：9

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