Wafer-scale integration of GaAs/AlGaAs core-shell nanowires on silicon by the single process of self-catalyzed molecular beam epitaxy

被引:3
|
作者
Minehisa, Keisuke [1 ,2 ]
Murakami, Ryo [3 ]
Hashimoto, Hidetoshi [1 ,2 ]
Nakama, Kaito [1 ,2 ]
Sakaguchi, Kenta [3 ]
Tsutsumi, Rikuo [3 ]
Tanigawa, Takeru [3 ]
Yukimune, Mitsuki [3 ]
Nagashima, Kazuki [4 ]
Yanagida, Takeshi [4 ]
Sato, Shino [2 ]
Hiura, Satoshi [2 ]
Murayama, Akihiro [2 ]
Ishikawa, Fumitaro [1 ]
机构
[1] Hokkaido Univ, Res Ctr Integrated Quantum Elect, Sapporo 0600813, Japan
[2] Hokkaido Univ, Fac Informat Sci & Technol, Sapporo 0600814, Japan
[3] Ehime Univ, Grad Sch Sci & Engn, Matsuyama 7908577, Japan
[4] Univ Tokyo, Grad Sch Engn, Tokyo 1138656, Japan
来源
NANOSCALE ADVANCES | 2023年 / 5卷 / 06期
基金
日本学术振兴会;
关键词
III-V; GAAS NANOWIRES; SEMICONDUCTOR NANOWIRES; GROWTH; EFFICIENCY; EMISSION; DENSITY;
D O I
10.1039/d2na00848c
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
GaAs/AlGaAs core-shell nanowires, typically having 250 nm diameter and 6 mu m length, were grown on 2-inch Si wafers by the single process of molecular beam epitaxy using constituent Ga-induced self-catalysed vapor-liquid-solid growth. The growth was carried out without specific pre-treatment such as film deposition, patterning, and etching. The outermost Al-rich AlGaAs shells form a native oxide surface protection layer, which provides efficient passivation with elongated carrier lifetime. The 2-inch Si substrate sample exhibits a dark-colored feature due to the light absorption of the nanowires where the reflectance in the visible wavelengths is less than 2%. Homogeneous and optically luminescent and adsorptive GaAs-related core-shell nanowires were prepared over the wafer, showing the prospect for large-volume III-V heterostructure devices available with this approach as complementary device technologies for integration with silicon.
引用
收藏
页码:1651 / 1663
页数:14
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